Patents by Inventor Julia A. Sakamoto

Julia A. Sakamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dynamic patterning method that removes phase conflicts and improves pattern fidelity and CDU on a two phase-pixelated digital scanner
    Patent number: 10310387
    Abstract: Phase conflicts in pattern transfer with phase masks can be resolve by exposing pattern features with a first pattern and a second pattern, wherein the second pattern is selected based on the phase conflicts. In scanned exposures using pulsed lasers, a number of exposures of the second pattern can be less than 20% of a total number of exposures.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: June 4, 2019
    Assignee: Nikon Corporation
    Inventors: Shane R. Palmer, Julia A. Sakamoto, Donis G. Flagello
  • DYNAMIC PATTERNING METHOD THAT REMOVES PHASE CONFLICTS AND IMPROVES PATTERN FIDELITY AND CDU ON A TWO PHASE-PIXELATED DIGITAL SCANNER
    Publication number: 20180292760
    Abstract: Phase conflicts in pattern transfer with phase masks can be resolve by exposing pattern features with a first pattern and a second pattern, wherein the second pattern is selected based on the phase conflicts. In scanned exposures using pulsed lasers, a number of exposures of the second pattern can be less than 20% of a total number of exposures.
    Type: Application
    Filed: June 12, 2018
    Publication date: October 11, 2018
    Inventors: Shane R. Palmer, Julia A. Sakamoto, Doris G. Flagello
  • DYNAMIC PATTERNING METHOD THAT REMOVES PHASE CONFLICTS AND IMPROVES PATTERN FIDELITY AND CDU ON A TWO PHASE-PIXELATED DIGITAL SCANNER
    Publication number: 20150234295
    Abstract: Phase conflicts in pattern transfer with phase masks can be resolve by exposing pattern features with a first pattern and a second pattern, wherein the second pattern is selected based on the phase conflicts. In scanned exposures using pulsed lasers, a number of exposures of the second pattern can be less than 20% of a total number of exposures.
    Type: Application
    Filed: February 20, 2015
    Publication date: August 20, 2015
    Inventors: Shane R. Palmer, Julia A. Sakamoto, Donis G. Flagello
  • Inverse optical design
    Patent number: 7832864
    Abstract: An imaging apparatus for simultaneously determining optical parameters of the eye comprising: a light source for illuminating at least a portion of the eye pupil; an illumination optical system for directing light rays emitted from the light source into the eye; a light receiving optical system for guiding the light rays reflected from the eye to a detector unit, wherein the detector unit detects an image intensity distribution from the light rays reflected from the eye; and an arithmetic unit for determining optical characteristics of the eye by parameter estimation is provided.
    Type: Grant
    Filed: June 16, 2008
    Date of Patent: November 16, 2010
    Assignees: The Arizona Board of Regents on Behalf of the University of Arizona, National University of Ireland, Galway
    Inventors: Harrison H. Barrett, Julia A. Sakamoto, Alexander V. Goncharov
  • INVERSE OPTICAL DESIGN
    Publication number: 20090009717
    Abstract: An imaging apparatus for simultaneously determining optical parameters of the eye comprising: a light source for illuminating at least a portion of the eye pupil; an illumination optical system for directing light rays emitted from the light source into the eye; a light receiving optical system for guiding the light rays reflected from the eye to a detector unit, wherein the detector unit detects an image intensity distribution from the light rays reflected from the eye; and an arithmetic unit for determining optical characteristics of the eye by parameter estimation is provided.
    Type: Application
    Filed: June 16, 2008
    Publication date: January 8, 2009
    Inventors: Harrison H. Barrett, Julia A. Sakamoto, Alexander V. Goncharov