Patents by Inventor Julie C. Biggs

Julie C. Biggs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forming robust solder interconnect structures by reducing effects of seed layer underetching
    Patent number: 7767575
    Abstract: A method for forming an interconnect structure for a semiconductor device includes defining a via in a passivation layer so as expose a top metal layer in the semiconductor device. A seed layer is formed over the passivation layer, sidewalls of the via, and the top metal layer. A barrier layer is formed over an exposed portion of the seed layer, the exposed portion defined by a first patterned opening of a first diameter, and a solder material is formed over the barrier layer using a second patterned opening of a second diameter. The second patterned opening is configured such that the second diameter is larger than the first diameter.
    Type: Grant
    Filed: January 2, 2009
    Date of Patent: August 3, 2010
    Assignee: Tessera Intellectual Properties, Inc.
    Inventors: Kamalesh K. Srivastava, Subhash L. Shinde, Tien-Jen Cheng, Sarah H. Knickerbocker, Roger A. Quinn, William E. Sablinski, Julie C. Biggs, David E. Eichstadt, Jonathan H. Griffith
  • Method of forming a bond pad on an I/C chip and resulting structure
    Patent number: 7572726
    Abstract: A method of forming wire bonds in (I/C) chips comprising: providing an I/C chip having a conductive pad for a wire bond with at least one layer of dielectric material overlying the pad; forming an opening through the dielectric material exposing a portion of said pad. Forming at least a first conductive layer on the exposed surface of the pad and on the surface of the opening. Forming a seed layer on the first conductive layer; applying a photoresist over the seed layer; exposing and developing the photoresist revealing the surface of the seed layer surrounding the opening; removing the exposed seed layer; removing the photoresist material in the opening revealing the seed layer. Plating at least one second layer of conductive material on the seed layer in the opening, and removing the first conductive layer on the dielectric layer around the opening. The invention also includes the resulting structure.
    Type: Grant
    Filed: November 10, 2005
    Date of Patent: August 11, 2009
    Assignee: International Business Machines Corporation
    Inventors: Julie C. Biggs, Tien-Jen Cheng, David E. Eichstadt, Lisa A. Fanti, Jonathan H. Griffith, Randolph F. Knarr, Sarah H. Knickerbocker, Kevin S. Petrarca, Roger A. Quon, Wolfgang Sauter, Kamalesh K. Srivastava, Richard P. Volant
  • FORMING ROBUST SOLDER INTERCONNECT STRUCTURES BY REDUCING EFFECTS OF SEED LAYER UNDERETCHING
    Publication number: 20090163019
    Abstract: A method for forming an interconnect structure for a semiconductor device includes defining a via in a passivation layer so as expose a top metal layer in the semiconductor device. A seed layer is formed over the passivation layer, sidewalls of the via, and the top metal layer. A barrier layer is formed over an exposed portion of the seed layer, the exposed portion defined by a first patterned opening of a first diameter, and a solder material is formed over the barrier layer using a second patterned opening of a second diameter. The second patterned opening is configured such that the second diameter is larger than the first diameter.
    Type: Application
    Filed: January 2, 2009
    Publication date: June 25, 2009
    Applicant: International Business Machines Corporation
    Inventors: Kamalesh K. Srivastava, Subhash L. Shinde, Tien-Jen Cheng, Sarah H. Knickerbocker, Roger A. Quon, William E. Sablinski, Julie C. Biggs, David E. Eichstadt, Jonathan H. Griffith
  • Method for forming robust solder interconnect structures by reducing effects of seed layer underetching
    Patent number: 7473997
    Abstract: A method for forming an interconnect structure for a semiconductor device includes defining a via in a passivation layer so as expose a top metal layer in the semiconductor device. A seed layer is formed over the passivation layer, sidewalls of the via, and the top metal layer. A barrier layer is formed over an exposed portion of the seed layer, the exposed portion defined by a first patterned opening. The semiconductor device is annealed so as to cause atoms from the barrier layer to diffuse into the seed layer thereunderneath, wherein the annealing causes diffused regions of the seed layer to have an altered electrical resistivity and electrode potential with respect to undiffused regions of the seed layer.
    Type: Grant
    Filed: September 12, 2005
    Date of Patent: January 6, 2009
    Assignee: International Business Machines Corporation
    Inventors: Kamalesh K. Srivastava, Subhash L. Shinde, Tien-Jen Cheng, Sarah H. Knickerbocker, Roger A. Quon, William E. Sablinski, Julie C. Biggs, David E. Eichstadt, Jonathan H. Griffith
  • I/C chip suitable for wire bonding
    Patent number: 6995475
    Abstract: A method of forming wire bonds in (I/C) chips comprising: providing an I/C chip having a conductive pad for a wire bond with at least one layer of dielectric material overlying the pad; forming an opening through the dielectric material exposing a portion of said pad. Forming at least a first conductive layer on the exposed surface of the pad and on the surface of the opening. Forming a seed layer on the first conductive layer; applying a photoresist over the seed layer; exposing and developing the photoresist revealing the surface of the seed layer surrounding the opening; removing the exposed seed layer; removing the photoresist material in the opening revealing the seed layer. Plating at least one second layer of conductive material on the seed layer in the opening, and removing the first conductive layer on the dielectric layer around the opening. The invention also includes the resulting structure.
    Type: Grant
    Filed: September 18, 2003
    Date of Patent: February 7, 2006
    Assignee: International Business Machines Corporation
    Inventors: Julie C. Biggs, Tien-Jen Cheng, David E. Eichstadt, Lisa A. Fanti, Jonathan H. Griffith, Randolph F. Knarr, Sarah H. Knickerbocker, Kevin S. Petrarca, Roger A. Quon, Wolfgang Sauter, Kamalesh K. Srivastava, Richard P. Volant
  • Method for forming robust solder interconnect structures by reducing effects of seed layer underetching
    Patent number: 6995084
    Abstract: A method for forming an interconnect structure for a semiconductor device includes defining a via in a passivation layer so as expose a top metal layer in the semiconductor device. A seed layer is formed over the passivation layer, sidewalls of the via, and the top metal layer. A barrier layer is formed over an exposed portion of the seed layer, the exposed portion defined by a first patterned opening. The semiconductor device is annealed so as to cause atoms from the barrier layer to diffuse into the seed layer thereunderneath, wherein the annealing causes diffused regions of the seed layer to have an altered electrical resistivity and electrode potential with respect to undiffused regions of the seed layer.
    Type: Grant
    Filed: March 17, 2004
    Date of Patent: February 7, 2006
    Assignee: International Business Machines Corporation
    Inventors: Kamalesh K. Srivastava, Subhash L. Shinde, Tien-Jen Cheng, Sarah H. Knickerbocker, Roger A. Quon, William E. Sablinski, Julie C. Biggs, David E. Eichstadt, Jonathan H. Griffith