Abstract: Fabrication of vertical diodes for radiation sensing using a low temperature microwave anneal is provided. This kind of anneal allows the back side processing to be performed after the front side processing is done without damaging the front side structures. This enables a simplified fabrication of thinned detectors compared to a conventional silicon on insulator process. Another feature that this technology enables is a thin entrance window for a detector that also serves as the doped diode termination. Such thin entrance windows are especially suitable for detection of low energy radiation.

Abstract: Fabrication of vertical diodes for radiation sensing using a low temperature microwave anneal is provided. This kind of anneal allows the back side processing to be performed after the front side processing is done without damaging the front side structures. This enables a simplified fabrication of thinned detectors compared to a conventional silicon on insulator process. Another feature that this technology enables is a thin entrance window for a detector that also serves as the doped diode termination. Such thin entrance windows are especially suitable for detection of low energy radiation.

Abstract: Apparatus for supplying a signal after a predetermined time delay comprises circuitry for generating a base delay signal that is synchronized to a stable master oscillator insensitive to changes in at least one environmental variable. A vernier signal delay circuit provides delay increments smaller than those available from the base delay signal, the delay increments being sensitive to said at least one environmental variable. Storage circuitry is provided for storing information related to the duration of the delay increments as function of at least one environmental variable for which correction is to be supplied. Sensing circuitry is provided for sensing the at least one environmental variable for which correction is to be provided to supply a sensed at least one environmental variable.