Abstract: A thermal flow sensor comprising at least one first element (2) suspended with respect to a support, said first suspended element (2) being of an electrically conductive material, first means (6) for biasing said suspended element (2) and first means (8) for measuring the variation of the electric voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first biasing means (6) are formed by an alternating current source the intensity of which provides heating of the first suspended element (2) by Joule effect.

Abstract: A MEMS/NEMS device having an adjustable frequency response comprises an array of electrostatically actuated resonators, an electrostatic actuation circuit, electrical detection means, and means adjusting the frequency response of the resonators. The device comprises resonators having a movable portion, electrically connected in series between a first biasing potential VB and a second biasing potential VB2, each resonator biased to a potential Vi between VB and VB2, depending on position in the series. The electrostatic actuation circuit comprises, for each resonator, an actuation electrode facing the movable portion, all electrodes being connected in parallel to a common control potential VIN, the actuation voltage of each resonator being equal to VIN?Vi. The detection means comprises a detection output common to all resonators, the output being connected to an output potential Vout.

Abstract: The invention relates to a thermal flow sensor comprising: a support, at least one element intended to be vibrated relative to the support, suspension means for said vibrating element relative to the vibrating element, means for heating the vibrating element, means for electrostatic excitation of the vibrating element so as to vibrate it at its resonance frequency, piezoelectric gauges for detecting the resonance frequency variation of the vibrating element, the gauges forming means for heating the vibrating element by Joule effect and the suspension means comprising two beams formed by nanowires so as to reduce the heat losses from the vibrating element toward the support.

Abstract: A method of forming a microelectronic device comprising, on a same substrate, at least one electro-mechanical component provided with a suspended structure and at least one transistor, the method comprising a step of release of the suspended structure from the electromechanical component after having formed metal interconnection levels of components.

Abstract: A thermal flow sensor comprising at least one first element (2) suspended with respect to a support, said first suspended element (2) being of an electrically conductive material, first means (6) for biasing said suspended element (2) and first means (8) for measuring the variation of the electric voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first biasing means (6) are formed by an alternating current source the intensity of which provides heating of the first suspended element (2) by Joule effect.

Abstract: A MEMS/NEMS device having an adjustable frequency response comprises an array of electrostatically actuated resonators, an electrostatic actuation circuit, electrical detection means, and means adjusting the frequency response of the resonators. The device comprises resonators having a movable portion, electrically connected in series between a first biasing potential VB and a second biasing potential VB2, each resonator biased to a potential Vi between VB and VB2, depending on position in the series. The electrostatic actuation circuit comprises, for each resonator, an actuation electrode facing the movable portion, all electrodes being connected in parallel to a common control potential VIN, the actuation voltage of each resonator being equal to VIN?Vi. The detection means comprises a detection output common to all resonators, the output being connected to an output potential Vout.

Abstract: An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.

Abstract: A method of forming a microelectronic device comprising, on a same substrate, at least one electro-mechanical component provided with a suspended structure and at least one transistor, the method comprising a step of release of the suspended structure from the electromechanical component after having formed metal interconnection levels of components.

Abstract: Device for analysis by gas phase chromatography comprising: a chromatography micro-column, a detection module comprising at least one NEMS and/or MEMS type detector arranged in channel, a direct fluidic connection between an evacuation end of the chromatography micro-column and an admission end of the channel of the detection module, a thermoelectric module, the hot face heating the chromatography micro-column and the cold face cooling the detection module.

Abstract: The resonator comprises an oscillating element and first and second excitation electrodes of the oscillating element. An AC signal generator is connected to the first and second excitation electrodes and delivers first and second signals of the same amplitudes and in antiphase on the first and second electrodes. A first DC voltage source is connected to a third electrode. A second DC voltage source is connected to a fourth electrode. An additional electrode is electrically connected to the oscillating element. A signal representative of oscillation of the oscillating element is provided by the additional electrode formed by an anchoring point of the oscillating element and biased by a third DC voltage.

Abstract: An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.

Abstract: The resonator comprises an oscillating element and first and second excitation electrodes of the oscillating element. An AC signal generator is connected to the first and second excitation electrodes and delivers first and second signals of the same amplitudes and in antiphase on the first and second electrodes. A first DC voltage source is connected to a third electrode. A second DC voltage source is connected to a fourth electrode. An additional electrode is electrically connected to the oscillating element. A signal representative of oscillation of the oscillating element is provided by the additional electrode formed by an anchoring point of the oscillating element and biased by a third DC voltage.