Patents by Inventor Julien BORREL
Julien BORREL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11817490Abstract: A method for making a quantum device including: forming, over a semiconductor layer, a graphoepitaxy guide forming a cavity with a lateral dimension that is a multiple of a period of self-assembly of a di-block copolymer into lamellas; first deposition of the copolymer in the cavity; first self-assembly of the copolymer, forming a first alternating arrangement of first lamellas and of second lamellas; removal of the first lamellas; implantation of dopants in portions of the semiconductor layer previously covered with the first lamellas; removal of the second lamellas; second deposition of the copolymer in the cavity, over a gate material; second self-assembly of the copolymer, forming a second alternating arrangement of first and second lamellas; removal of the second lamellas; etching of portions of the gate material previously covered with the second lamellas.Type: GrantFiled: August 16, 2021Date of Patent: November 14, 2023Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Louis Hutin, Julien Borrel, Raluca Tiron
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Publication number: 20230128033Abstract: According to one aspect provision is made of a method for ion implantation in a semiconductor wafer placed in an implantation chamber under vacuum, the semiconductor wafer having an integrated circuit area and a peripheral area around this integrated circuit area, the ion implantation allowing to apply a doping in regions, called implantation regions, of the integrated circuit area, the method comprising: forming a photosensitive resin coating serving as a mask on the semiconductor wafer, then forming openings in the photosensitive resin coating at said implantation regions of the integrated circuit area and at least at one region of the peripheral area, then implanting ions in the semiconductor wafer.Type: ApplicationFiled: October 12, 2022Publication date: April 27, 2023Applicant: STMicroelectronics (Crolles 2) SASInventors: Julien BORREL, Alexis GAUTHIER, Fanny HILARIO, Ludovic BERTHIER, Paul DUMAS, Edoardo BREZZA
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Patent number: 11621324Abstract: A bipolar junction transistor includes an extrinsic collector region buried in a semiconductor substrate under an intrinsic collector region. Carbon-containing passivating regions are provided to delimit the intrinsic collector region. An insulating layer on the intrinsic collector region includes an opening within which an extrinsic base region is provided. A semiconductor layer overlies the insulating layer, is in contact with the extrinsic base region, and includes an opening with insulated sidewalls. The collector region of the transistor is provided between the insulated sidewalls.Type: GrantFiled: May 18, 2021Date of Patent: April 4, 2023Assignee: STMicroelectronics (Crolles 2) SASInventors: Alexis Gauthier, Julien Borrel
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Patent number: 11322363Abstract: Atoms are implanted in a semiconductor region at a higher concentration in a peripheral part of the semiconductor region than in a central part of the semiconductor region. A metallic region is then formed to cover the semiconductor region. A heat treatment is the performed to form an intermetallic region from the metallic region and the semiconductor region.Type: GrantFiled: June 4, 2020Date of Patent: May 3, 2022Assignee: STMicroelectronics (Crolles 2) SASInventors: Julien Borrel, Magali Gregoire
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Publication number: 20220052179Abstract: A method for making a quantum device including: forming, over a semiconductor layer, a graphoepitaxy guide forming a cavity with a lateral dimension that is a multiple of a period of self-assembly of a di-block copolymer into lamellas; first deposition of the copolymer in the cavity; first self-assembly of the copolymer, forming a first alternating arrangement of first lamellas and of second lamellas; removal of the first lamellas; implantation of dopants in portions of the semiconductor layer previously covered with the first lamellas; removal of the second lamellas; second deposition of the copolymer in the cavity, over a gate material; second self-assembly of the copolymer, forming a second alternating arrangement of first and second lamellas; removal of the second lamellas; etching of portions of the gate material previously covered with the second lamellas.Type: ApplicationFiled: August 16, 2021Publication date: February 17, 2022Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Louis HUTIN, Julien BORREL, Raluca TIRON
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Publication number: 20210273052Abstract: A bipolar junction transistor includes an extrinsic collector region buried in a semiconductor substrate under an intrinsic collector region. Carbon-containing passivating regions are provided to delimit the intrinsic collector region. An insulating layer on the intrinsic collector region includes an opening within which an extrinsic base region is provided. A semiconductor layer overlies the insulating layer, is in contact with the extrinsic base region, and includes an opening with insulated sidewalls. The collector region of the transistor is provided between the insulated sidewalls.Type: ApplicationFiled: May 18, 2021Publication date: September 2, 2021Applicant: STMicroelectronics (Crolles 2) SASInventors: Alexis GAUTHIER, Julien BORREL
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Patent number: 11038017Abstract: A bipolar junction transistor includes an extrinsic collector region buried in a semiconductor substrate under an intrinsic collector region. Carbon-containing passivating regions are provided to delimit the intrinsic collector region. An insulating layer on the intrinsic collector region includes an opening within which an extrinsic base region is provided. A semiconductor layer overlies the insulating layer, is in contact with the extrinsic base region, and includes an opening with insulated sidewalls. The collector region of the transistor is provided between the insulated sidewalls.Type: GrantFiled: February 19, 2019Date of Patent: June 15, 2021Assignee: STMicroelectronics (Crolles 2) SASInventors: Alexis Gauthier, Julien Borrel
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Publication number: 20200388505Abstract: Atoms are implanted in a semiconductor region at a higher concentration in a peripheral part of the semiconductor region than in a central part of the semiconductor region. A metallic region is then formed to cover the semiconductor region. A heat treatment is the performed to form an intermetallic region from the metallic region and the semiconductor region.Type: ApplicationFiled: June 4, 2020Publication date: December 10, 2020Applicant: STMicroelectronics (Crolles 2) SASInventors: Julien BORREL, Magali GREGOIRE
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Publication number: 20190259838Abstract: A bipolar junction transistor includes an extrinsic collector region buried in a semiconductor substrate under an intrinsic collector region. Carbon-containing passivating regions are provided to delimit the intrinsic collector region. An insulating layer on the intrinsic collector region includes an opening within which an extrinsic base region is provided. A semiconductor layer overlies the insulating layer, is in contact with the extrinsic base region, and includes an opening with insulated sidewalls. The collector region of the transistor is provided between the insulated sidewalls.Type: ApplicationFiled: February 19, 2019Publication date: August 22, 2019Applicant: STMicroelectronics (Crolles 2) SASInventors: Alexis GAUTHIER, Julien BORREL
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Patent number: 9911827Abstract: A process for manufacturing a Schottky barrier field-effect transistor is provided. The process includes: providing a structure including a control gate and a semiconductive layer positioned under the gate and having protrusions that protrude laterally with respect to the gate; anisotropically etching at least one of the protrusions by using the control gate as a mask, so as to form a recess in this protrusion, this recess defining a lateral face of the semiconductive layer; depositing a layer of insulator on the lateral face of the semiconductive layer; and depositing a metal in the recess on the layer of insulator so as to form a contact of metal/insulator/semiconductor type between the deposit of metal and the lateral face of the semiconductive layer.Type: GrantFiled: December 8, 2016Date of Patent: March 6, 2018Assignees: Commissariat A L'Energie Atomique et aux Energies Alternatives, ST Microelectronics SA, ST Microelectronics (Crolles 2) SASInventors: Louis Hutin, Julien Borrel, Yves Morand, Fabrice Nemouchi
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Patent number: 9831319Abstract: A field-effect transistor, including a source, drain and channel formed in a semiconductor layer a gate stack placed above the channel, including a metal electrode, a first layer of electrical insulator placed between the metal electrode and the channel, and a second layer of electrical insulator covering the metal electrode; a metal contact placed plumb with the source or drain and at least partially plumb with said gate stack; and a third layer of electrical insulator placed between said metal contact and said source or said drain.Type: GrantFiled: March 2, 2016Date of Patent: November 28, 2017Assignee: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Julien Borrel, Louis Hutin, Yves Morand, Fabrice Nemouchi, Heimanu Niebojewski
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Publication number: 20170162672Abstract: A process for manufacturing a Schottky barrier field-effect transistor is provided. The process includes: providing a structure including a control gate and a semiconductive layer positioned under the gate and having protrusions that protrude laterally with respect to the gate; anisotropically etching at least one of the protrusions by using the control gate as a mask, so as to form a recess in this protrusion, this recess defining a lateral face of the semiconductive layer; depositing a layer of insulator on the lateral face of the semiconductive layer; and depositing a metal in the recess on the layer of insulator so as to form a contact of metal/insulator/semiconductor type between the deposit of metal and the lateral face of the semiconductive layer.Type: ApplicationFiled: December 8, 2016Publication date: June 8, 2017Applicants: Commissariat a l'energie atomique et aux energies alternatives, STMicroelectronics SA, STMicroelectronics (Crolles 2) SASInventors: Louis HUTIN, Julien BORREL, Yves MORAND, Fabrice NEMOUCHI
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Publication number: 20160260819Abstract: A field-effect transistor, including a source, drain and channel formed in a semiconductor layer a gate stack placed above the channel, including a metal electrode, a first layer of electrical insulator placed between the metal electrode and the channel, and a second layer of electrical insulator covering the metal electrode; a metal contact placed plumb with the source or drain and at least partially plumb with said gate stack; and a third layer of electrical insulator placed between said metal contact and said source or said drain.Type: ApplicationFiled: March 2, 2016Publication date: September 8, 2016Applicant: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Julien BORREL, Louis Hutin, Yves Morand, Fabrice Nemouchi, Heimanu Niebojewski