Patents by Inventor Julien Bounouar
Julien Bounouar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11953484Abstract: A setting method includes setting the conductances of the controllable restrictions of an airborne molecular contamination measurement station. The setting method includes an initial identification step, prior to the carrying-out of an airborne molecular contamination measurement step, and during which the sampling line that has the lowest conductance when the conductance of the controllable restriction of the said sampling line is set to its maximum value is determined, and an initial conductance-setting step prior to the carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step. Further, a measurement station is provided for measuring airborne molecular contamination.Type: GrantFiled: January 22, 2020Date of Patent: April 9, 2024Assignee: PFEIFFER VACUUMInventors: Julien Bounouar, Olivier Le Barillec, Nicolas Chapel
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Patent number: 11768134Abstract: A station for measuring airborne molecular contamination includes: at least one gas analyser; a conditioning pump; and a sequencing unit including a sequencing program defining an order for the measurements to be performed for at least two sampling lines, the sequencing unit being configured to control the connection of a sampling line to be measured, the measurement of which is programmed to follow that of a sampling line being measured, with the conditioning pump, while controlling the connection of the sampling line being measured with the at least one gas analyser. A method for measuring airborne molecular contamination using such a station is also disclosed.Type: GrantFiled: May 21, 2019Date of Patent: September 26, 2023Assignee: PFEIFFER VACUUMInventors: Julien Bounouar, Olivier Le Barillec
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Publication number: 20230221220Abstract: A measurement station for measuring airborne molecular contamination includes at least one gas analyser, at least two controllable isolation valves connected in parallel to the input of the at least one gas analyser, a conditioning pump, at least two calibrated orifices connected in parallel to the input of the conditioning pump, at least one distributor to connect each controllable isolation valve with, on one side, a sampling line and, on the other side, a calibrated orifice, and a control unit linked to the controllable isolation valves. The control unit commands the opening or the closing of the controllable isolation valves in order to be able to connect the at least one gas analyser with at least one sampling line.Type: ApplicationFiled: March 26, 2021Publication date: July 13, 2023Applicant: PFEIFFER VACUUMInventors: Bertrand BELLET, Julien BOUNOUAR, Olivier LE BARILLEC
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Patent number: 11430681Abstract: There is provided a device and method for controlling a tightness of at least one transport enclosure for conveyance and atmospheric storage of semiconductor substrates, the transport enclosure including at least two ventilation ports, the device including at least one interface configured to be coupled to the transport enclosure, the interface including at least two connecting heads, at least one connecting head of the heads being formed by a measurement head configured to engage in a ventilation port of the ventilation ports of the transport enclosure, the measurement head including a projecting end piece, opening through at least one aperture, and a peripheral sealing element surrounding the end piece, all of the ventilation ports of the transport enclosure being coupled to the connecting head of the interface. There is also provided a method for controlling the tightness of the transport enclosure.Type: GrantFiled: November 6, 2017Date of Patent: August 30, 2022Assignee: PFEIFFER VACUUMInventors: Bertrand Bellet, Julien Bounouar, Nicolas Chapel
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Publication number: 20220099646Abstract: A setting method includes setting the conductances of the controllable restrictions of an airborne molecular contamination measurement station. The setting method includes an initial identification step, prior to the carrying-out of an airborne molecular contamination measurement step, and during which the sampling line that has the lowest conductance when the conductance of the controllable restriction of the said sampling line is set to its maximum value is determined, and an initial conductance-setting step prior to the carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step. Further, a measurement station is provided for measuring airborne molecular contamination.Type: ApplicationFiled: January 22, 2020Publication date: March 31, 2022Applicant: PFEIFFER VACUUMInventors: Julien BOUNOUAR, Olivier LE BARILLEC, Nicolas CHAPEL
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Publication number: 20210190647Abstract: A station for measuring airborne molecular contamination includes: at least one gas analyser; a conditioning pump; and a sequencing unit including a sequencing program defining an order for the measurements to be performed for at least two sampling lines, the sequencing unit being configured to control the connection of a sampling line to be measured, the measurement of which is programmed to follow that of a sampling line being measured, with the conditioning pump, while controlling the connection of the sampling line being measured with the at least one gas analyser. A method for measuring airborne molecular contamination using such a station is also disclosed.Type: ApplicationFiled: May 21, 2019Publication date: June 24, 2021Applicant: PFEIFFER VACUUMInventors: Julien BOUNOUAR, Olivier LE BARILLEC
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Publication number: 20200051844Abstract: There is provided a device and method for controlling a tightness of at least one transport enclosure for conveyance and atmospheric storage of semiconductor substrates, the transport enclosure including at least two ventilation ports, the device including at least one interface configured to be coupled to the transport enclosure, the interface including at least two connecting heads, at least one connecting head of the heads being formed by a measurement head configured to engage in a ventilation port of the ventilation ports of the transport enclosure, the measurement head including a projecting end piece, opening through at least one aperture, and a peripheral sealing element surrounding the end piece, all of the ventilation ports of the transport enclosure being coupled to the connecting head of the interface. There is also provided a method for controlling the tightness of the transport enclosure.Type: ApplicationFiled: November 6, 2017Publication date: February 13, 2020Applicant: PFEIFFER VACUUMInventors: Bertrand BELLET, Julien BOUNOUAR, Nicolas CHAPEL
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Patent number: 10431484Abstract: A method for measuring contamination of a transport box for atmospheric conveyance and storage of substrates is provided, the method including: measuring a concentration of at least one gaseous species inside the transport box by a measurement device including at least one gas analyzer and a measurement line connecting the at least one gas analyzer to an interface, the interface placing the measurement line in communication with an internal atmosphere of the transport box; and supplying a gas flow containing water vapor to the measurement device. There is also provided a station for measuring contamination of a transport box for atmospheric conveyance and storage of substrates.Type: GrantFiled: August 29, 2016Date of Patent: October 1, 2019Assignee: PFEIFFER VACUUMInventors: Olivier Le-Barillec, Julien Bounouar
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Publication number: 20180247847Abstract: A method for measuring contamination of a transport box for atmospheric conveyance and storage of substrates is provided, the method including: measuring a concentration of at least one gaseous species inside the transport box by a measurement device including at least one gas analyzer and a measurement line connecting the at least one gas analyzer to an interface, the interface placing the measurement line in communication with an internal atmosphere of the transport box; and supplying a gas flow containing water vapor to the measurement device. There is also provided a station for measuring contamination of a transport box for atmospheric conveyance and storage of substrates.Type: ApplicationFiled: August 29, 2016Publication date: August 30, 2018Applicant: PFEIFFER VACUUMInventors: Olivier LE-BARILLEC, Julien BOUNOUAR
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Patent number: 9841345Abstract: The invention concerns a detection method for checking sealed product packages for leaks, characterized in that it comprises the following steps: at least one previously sealed product (2) is placed in an air, nitrogen, or oxygen atmosphere, in a chamber (3) (step 101), the pressure in the chamber (3) is lowered to a secondary vacuum pressure below 10?1 mbar and, while continuing the secondary vacuum pumping of the chamber (3), the gases contained in the chamber are ionized to monitor the change in the chamber (3) of the concentration of at least one gaseous species of the gas volume contained within the sealed product (2) chosen from among nitrogen, oxygen, or argon, by analysis by optical emission or mass spectrometry (step 102).Type: GrantFiled: July 23, 2013Date of Patent: December 12, 2017Assignee: ADIXEN VACUUM PRODUCTSInventors: Julien Bounouar, Julien Palisson, Philippe Bunod, Sylvain Rioufrays, Smail Hadj-Rabah
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Patent number: 9810617Abstract: The present invention relates to a station for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure, said transport carrier comprising a rigid casing (2) containing an aperture and a removable door (3) allowing the aperture to be closed, the measuring station comprising: a controlled environment chamber (4) comprising at least one load port (8) capable of coupling, on the one hand, to the rigid casing (2), and on the other hand, to the door (3) of the transport carrier, in order to move the door (3) into the controlled environment chamber (4) and bring the interior of the rigid casing (2) into communication with the interior of the controlled environment chamber (4); and a measuring module (5) comprising a particle measuring unit (14) and a casing-measuring interface (16) configured to couple to the rigid transport carrier casing (2) coupled to the controlled environment chamber (4) in the place of the door (3), characterized inType: GrantFiled: November 29, 2013Date of Patent: November 7, 2017Assignee: ADIXEN VACUUM PRODUCTSInventors: Cindy Thovex, Julien Bounouar, Arnaud Favre
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Patent number: 9779972Abstract: A device for handling substrates within a semiconductor manufacturing plant having substrate processing equipments, substrate storage means, substrate transport means, and a manufacturing execution system (MES) functionally related with the substrate processing equipments, the substrate storage means and the substrate transport means, including at least one substrate storage and transport box that is transported by the transport means and stored in the storage means; at least one gas analysis device of the gases forming the internal atmosphere of the substrate storage and transport box, which produces analysis signals representative of the quantity of the critical gas that is likely to generate molecular contamination, which is present in the storage and transport box; and an execution device which pilots the transport means and the storage means, with the execution device comprising instructions for detecting a molecular decontamination need as a function of analysis signals emitted by the gas analysis devicType: GrantFiled: December 16, 2010Date of Patent: October 3, 2017Assignee: ADIXEN VACUUM PRODUCTSInventors: Arnaud Favre, Julien Bounouar
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Publication number: 20150276572Abstract: The present invention relates to a station for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure, said transport carrier comprising a rigid casing (2) containing an aperture and a removable door (3) allowing the aperture to be closed, the measuring station comprising: a controlled environment chamber (4) comprising at least one load port (8) capable of coupling, on the one hand, to the rigid casing (2), and on the other hand, to the door (3) of the transport carrier, in order to move the door (3) into the controlled environment chamber (4) and bring the interior of the rigid casing (2) into communication with the interior of the controlled environment chamber (4); and a measuring module (5) comprising a particle measuring unit (14) and a casing-measuring interface (16) configured to couple to the rigid transport carrier casing (2) coupled to the controlled environment chamber (4) in the place of the door (3), characterized inType: ApplicationFiled: November 29, 2013Publication date: October 1, 2015Applicant: ADIXEN VACUUM PRODUCTSInventors: Cindy Thovex, Julien Bounouar, Arnaud Favre
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Publication number: 20150211955Abstract: The invention concerns a detection method for checking sealed product packages for leaks, characterised in that it comprises the following steps: at least one previously sealed product (2) is placed in an air, nitrogen, or oxygen atmosphere, in a chamber (3) (step 101), the pressure in the chamber (3) is lowered to a secondary vacuum pressure below 10?1 mbar and, while continuing the secondary vacuum pumping of the chamber (3), the gases contained in the chamber are ionised to monitor the change in the chamber (3) of the concentration of at least one gaseous species of the gas volume contained within the sealed product (2) chosen from among nitrogen, oxygen, or argon, by analysis by optical emission or mass spectrometry (step 102).Type: ApplicationFiled: July 23, 2013Publication date: July 30, 2015Applicant: ADIXEN VACUUM PRODUCTSInventors: Julien Bounouar, Julien Palisson, Philippe Bunod, Sylvain Rioufrays, Smail Hadj-Rabah
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Publication number: 20130152977Abstract: The object of the present invention is a device for depolluting a non-sealed, confined environment (1) having a natural leakage (6) and including an interior space (9) bounded by a wall (7), comprising a depollution enclosure (11, 30) means (32, 42) for pumping gas and means (33, 43) for introducing gas. The depollution enclosure (11, 30) has at least two chambers (12, 13; 31, 41) separated by a sealing wall (14, 49). A first chamber (12, 31) is constituted by the part of the enclosure that is situated is contact with the wall (7) of the non-sealed, confined environment (1) and cooperates with first means for pumping (42) and first means for introducing gas (43), and a second chamber (13, 41) is constituted by the part of the enclosure which is situated in contact wife the natural leakage (6) from the non-sealed, confined environment (1) and cooperates with second means for pumping (42) and second means for introducing gas (43).Type: ApplicationFiled: September 6, 2011Publication date: June 20, 2013Applicant: ADIXEN VACUUM PRODUCTSInventors: Arnaud Favre, Smail Hadj Rabah, Julien Bounouar
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Patent number: 8462335Abstract: The object of the invention is a system for analyzing gases which are at a pressure on the order of a secondary vacuum. The system includes a gas ionization device that includes a cathode having conducting walls defining a cylindrical volume and a disc including at least one central through hole, an anode placed substantially at the center of the hole, a plasma source, the plasma being generated in the cylindrical volume by the combined action of an electric field and a magnetic field, orthogonal to the electric field, a system for collecting the light radiation emitted by the plasma, a cylindrical cavity coaxial to the anode having a conductance lower than that of the cylindrical volume and arranged between the ionization device and the collector system, and an analysis device for the ionized gases including an optical spectrometer for analyzing the evolution of the radiating spectrum.Type: GrantFiled: July 22, 2008Date of Patent: June 11, 2013Assignee: Alcatel LucentInventors: Julien Bounouar, Smail Hadj-Rabah
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Publication number: 20120259449Abstract: A device for handling substrates within a semiconductor manufacturing plant having substrate processing equipments, substrate storage means, substrate transport means, and a manufacturing execution system (MES) functionally related with the substrate processing equipments, the substrate storage means and the substrate transport means, including at least one substrate storage and transport box that is transported by the transport means and stored in the storage means; at least one gas analysis device of the gases forming the internal atmosphere of the substrate storage and transport box, which produces analysis signals representative of the quantity of the critical gas that is likely to generate molecular contamination, which is present in the storage and transport box; and an execution device which pilots the transport means and the storage means, with the execution device comprising instructions for detecting a molecular decontamination need as a function of analysis signals emitted by the gas analysis devicType: ApplicationFiled: December 16, 2010Publication date: October 11, 2012Applicant: ADIXEN VACUUM PRODUCTSInventors: Arnaud Favre, Julien Bounouar
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Publication number: 20120024394Abstract: The invention relates to a method for lowering the pressure in a device charge-discharge lock from atmospheric pressure to a sub-atmospheric transfer pressure, said lock comprising a chamber in which at least one substrate is arranged at atmospheric pressure, said method comprising: a first step (101), in which first primary pumping is carried out from atmospheric pressure to a first characteristic threshold, using a primary pump with limited pumping rate, while isolating a turbomolecular pumping of said chamber; a second step (102) following said first step (101), in which a second primary pumping is carried out, faster than in said first step, to a second characteristic threshold, maintaining the isolation of the turbomolecular pumping; a third step (103) following said second step (102), in which secondary pumping is performed using said turbomolecular pumping upstream from the first pumping, and the primary pump chamber is isolated. The invention also relates to a device for implementing the method.Type: ApplicationFiled: December 18, 2009Publication date: February 2, 2012Applicant: ADIXEN VACUUM PRODUCTSInventors: Julien Bounouar, Jean-Marie Foray
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Publication number: 20100277724Abstract: The object of the invention is a system (2) for analyzing gases which are at a pressure on the order of a secondary vacuum. The system includes a gas ionisation device (4) that comprises a cathode (14) having conducting walls (12) defining a cylindrical volume (11) and a disc (15) including at least one central through hole (31), an anode (13) placed substantially at the centre of the hole (31), a plasma source, the plasma being generated in the cylindrical volume by the combined action of an electric field E (17) and a magnetic field B (19) orthogonal to the electric field E (17), a system for collecting the light radiation emitted by the plasma, a cylindrical cavity (23) coaxial to the anode (13) having a conductance lower than that of the cylindrical volume (11) and arranged between the ionisation device (5) and the collector system (5), and and an analysis device (6) for the ionised gases including an optical spectrometer (41) for analysing the evolution of the radiating spectrum.Type: ApplicationFiled: July 22, 2008Publication date: November 4, 2010Inventors: Julien Bounouar, Smail Hadj-Rabah
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Patent number: 7468790Abstract: A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma (4) present in the gas mixture under analysis, a measurement system (20) is used to take a raw optical spectrum of said radiation emitted by the plasma (4), and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising a step of generating a pruned optical spectrum, which step consists in making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion, and subsequently said pruned spectrum is compared with the library of reference optical spectra.Type: GrantFiled: February 24, 2005Date of Patent: December 23, 2008Assignee: AlcatelInventors: Gloria Sogan, Julien Bounouar, Jean-Pierre Desbiolles, Isabelle Gaurand