Abstract: A method and system for calibrating radiation sensing devices, such as pyrometers, in thermal processing chambers are disclosed. The system includes a reflective device positioned opposite the radiation sensing devices and a calibrating light source which emits light energy onto the reflective device. The system is designed so that each radiation sensing device is exposed to the same intensity of light being reflected off the reflective device, which has a preset value. The radiation sensing devices are then used to measure the amount of light energy being reflected which is then compared to the preset value for making any necessary adjustments.

Abstract: An apparatus and method for determining the temperature of a semiconductor wafer in a thermal processing chamber in the presence of a radiation absorbing gas, such as a vapor, is disclosed. The apparatus includes a temperature sensing device which senses the amount of electromagnetic radiation being emitted by a wafer being heated and a gas sensing device which senses the amount of a gas present within the chamber. The system further includes a controller which is placed in communication with the temperature sensing device and the gas sensing device. The controller is configured to determine a correction factor based upon the amount of gas contained within the chamber. The correction factor in combination with information received from the temperature sensing device are then used to determine the temperature of the wafer.

Abstract: This is a hand cursor for a digitizing system allowing easier positioning of the cursor at the points to be digitized. The cursor includes a quasi-sight window having a CCD panel for viewing a 2-dimensional area and an LCD panel for displaying it to the user. There is a vertical positioning line on the panel. A position signal generator is disposed in the cursor for continuously generating and outputting positional data from which a reference point position and the orientation of the positional line on the tablet surface can be dynamically determined. There is also position determination logic for inputting the electrical signal output from the CCD panel and the positional data from the positional generator and for determining a point on the tablet surface where the positional line crosses a line contained in a drawing disposed on the tablet surface over which the quasi-sight window is positioned as a point to digitize.