Abstract: A reregistration system for determining and positioning the location of a substrate target surface with respect to a plurality of charged particle beams used to directly write an integrated circuit pattern simultaneously at a plurality of locations on the substrate is disclosed.Reregistration is accomplished by scanning two or more of the charged particle beams over a corresponding number of reregistration fiducial marks on the substrate. The reregistration marks may consist of a material having a high atomic number or predefined topographical features. Electrons scattered from these marks are detected and converted to electrical signals. The temporal relationship between the scanning beams and the resultant electrical signals may then be used to determine substrate location.

Abstract: The system of the present invention provides means for quick and accurate measurement of various wheel alignment parameters of motor vehicles by the use of reflected light beams. A laser source mounted near the front end of the vehicle provides a pair of light beams directed 180 degrees apart across the front end of the vehicle. Each of the beams is reflected along the side of the vehicle by a roof mirror set mounted near each front corner of the vehicle. The mirror sets each deflect a beam through a constant net angle of 90 degrees for a wide range of angles of incident light so that the laser source can be rotated to quickly provide parallel beams which are aligned substantially parallel to the sides of the vehicle. These mirror sets also provide stable beams and present small movements thereof from affecting the accuracy of the measurements being made.

Abstract: A completely mixed system for controlling the return rate of activated sludge to the aeration tank in activated sludge sewage treatment system plants is disclosed wherein the return rate of activated sludge is controlled to maintain the density of the activated sludge in the aeration tank at an optimum value, which value will result in the optimum settling rate of the activated sludge in the secondary clarifier. The control system is continuous and requires the use of a computer, which continuously receives various measured quantities necessary to compute the control signal for the returned activated sludge pump. The carbon dioxide respired by the cells in the aeration tank is collected along with the aeration air and a non-dispersive infrared ray analyzer determines the percent of carbon dioxide in the collected gases. This determination is one of the factors entering into the computation of the rate of substrate consumption by the activated sludge.