Patents by Inventor Julius Ming-Lin Ming-Lin Tsai

Julius Ming-Lin Ming-Lin Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SENSOR WITH VACUUM-SEALED CAVITY
    Publication number: 20140230557
    Abstract: A method and apparatus for detecting underwater sounds is disclosed. An embodiment of the apparatus includes a substrate with a vacuum-sealed cavity. A support structure and an acoustic pressure sensor are situated on the substrate. The support structure of the apparatus may include a first oxide layer situated on the substrate, a silicon layer situated on the first oxide layer, and a second oxide layer situated on the silicon layer. The acoustic pressure sensor of the apparatus includes a first electrode layer situated on the substrate, a piezoelectric layer situated on the first electrode layer, and a second electrode layer situated on the piezoelectric layer. In one embodiment, the surface area of the second electrode layer is between about 70 to 90 percent of the surface area of the piezoelectric layer. In various embodiments, the support structure is thicker than the piezoelectric layer.
    Type: Application
    Filed: February 20, 2013
    Publication date: August 21, 2014
    Applicants: Agency for Science Technology and Research (A"STAR), PGS Geophysical AS
    Inventors: Jinghui Xu, Julius Ming-Lin Ming-Lin Tsai, Winston Sun, Chengliang Sun