Abstract: Provided is an apparatus for conveying an article on a plurality of rotatable main shafts arranged in parallel. The apparatus includes a plurality of auxiliary shafts inserted through the main shafts, respectively, so as to prevent deflection or bending of the main shafts, and a plurality of bearing members disposed between the main shafts and the auxiliary shafts for supporting the main shafts and allowing rotation of the main shafts. Therefore, the main shaft can be prevented from deflection or bending caused by its own weight or an article placed thereon.

Abstract: Provided are an apparatus and method for developing a large-sized liquid crystal display. The apparatus includes a bar-shaped developer spraying nozzle and a bar-shaped developer removing nozzle. The bar-shaped developer spraying nozzle is installed at a predetermined distance from a substrate and sprays a developer on the substrate. The bar-shaped developer removing nozzle is kept at a predetermined distance from a side of the developer spraying nozzle, collects the developer sprayed from the developer spraying nozzle in a vacuum state, and removes the sprayed developer. Accordingly, the apparatus and method can be applied to a rinsing process, a stripping process, a developing process, and an etching process.

Abstract: The multi functional cleaning module comprises a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them. The cleaning apparatus using the multi functional cleaning module comprises a driving part having a loading and an unloading portions as well as the multi functional cleaning module.

Abstract: The multi functional cleaning module comprises a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them.