Patents by Inventor Jum-Soo Chang

Jum-Soo Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a layer on a wafer
    Patent number: 7763550
    Abstract: A layer is formed on a semiconductor wafer in an apparatus having a processing chamber, a transferring chamber, and a wafer boat. The boat having the semiconductor wafer thereon is rotated in the transferring chamber. While the boat is rotated, the boat is transferred between the transferring chamber and the processing chamber and a reaction gas is provided to the processing chamber to form the layer on the wafer.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: July 27, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ji-Sang Yahng, Young-Wook Park, Jae-Jong Han, Jum-Soo Chang
  • Method of forming a layer on a wafer
    Publication number: 20050233559
    Abstract: A layer is formed on a semiconductor wafer in an apparatus having a processing chamber, a transferring chamber, and a wafer boat. The boat having the semiconductor wafer thereon is rotated in the transferring chamber. While the boat is rotated, the boat is transferred between the transferring chamber and the processing chamber and a reaction gas is provided to the processing chamber to form the layer on the wafer.
    Type: Application
    Filed: February 18, 2005
    Publication date: October 20, 2005
    Inventors: Ji-Sang Yahng, Young-Wook Park, Jae-Jong Han, Jum-Soo Chang