Patents by Inventor Jun-De LEE

Jun-De LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for controlling semiconductor manufacturing apparatus
    Patent number: 11670154
    Abstract: The present disclosure provides systems and methods for controlling a semiconductor manufacturing apparatus. A control system includes an inspection unit capturing a set of images of the semiconductor manufacturing apparatus, a sensor interface receiving the set of images and generating at least one input signal for a database server, and a control unit. The control unit includes a front end subsystem, a calculation subsystem, and a message and feedback subsystem. The calculation subsystem receives the data signal from the front end subsystem, wherein the calculation subsystem performs an artificial intelligence analytical process to determine, according to the data signal, whether a malfunction has occurred in the semiconductor manufacturing apparatus and to generate an output signal. The message and feedback subsystem generates an alert signal and a feedback signal according to the output signal, and the alert signal is transmitted to a user of the semiconductor manufacturing apparatus.
    Type: Grant
    Filed: October 6, 2020
    Date of Patent: June 6, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Tso-Hsin Lin, Chung-Heng Chen, Jun-De Lee
  • SYSTEM AND METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING APPARATUS
    Publication number: 20220108597
    Abstract: The present disclosure provides systems and methods for controlling a semiconductor manufacturing apparatus. A control system includes an inspection unit capturing a set of images of the semiconductor manufacturing apparatus, a sensor interface receiving the set of images and generating at least one input signal for a database server, and a control unit. The control unit includes a front end subsystem, a calculation subsystem, and a message and feedback subsystem. The calculation subsystem receives the data signal from the front end subsystem, wherein the calculation subsystem performs an artificial intelligence analytical process to determine, according to the data signal, whether a malfunction has occurred in the semiconductor manufacturing apparatus and to generate an output signal. The message and feedback subsystem generates an alert signal and a feedback signal according to the output signal, and the alert signal is transmitted to a user of the semiconductor manufacturing apparatus.
    Type: Application
    Filed: October 6, 2020
    Publication date: April 7, 2022
    Inventors: Tso-Hsin LIN, Chung-Heng CHEN, Jun-De LEE