Patents by Inventor Jun Emoto

Jun Emoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10512948
    Abstract: A gas purge unit 20 introduces a cleaning gas into a purging container 2 with an opening 2b therethrough. The gas purge unit 20 includes a first nozzle outlet 26 and a second nozzle outlet 28. The first nozzle outlet 26 blows out the cleaning gas from a lateral side line part of the opening 2b toward the inside of the purging container 2. The second nozzle outlet 28 blows out the cleaning gas from the lateral side line part of the opening 2b toward an opening surface of the opening 2b.
    Type: Grant
    Filed: November 19, 2015
    Date of Patent: December 24, 2019
    Assignee: TDK CORPORATION
    Inventors: Tadamasa Iwamoto, Jun Emoto
  • Publication number: 20190168268
    Abstract: A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the cleaning gas into the purge container. The second blowout member is disposed along the lateral side and includes a second nozzle port. The second nozzle port is disposed farther from the opening than the first nozzle port and blows the cleaning gas into the purge container. A load port apparatus includes the gas purge unit.
    Type: Application
    Filed: November 21, 2018
    Publication date: June 6, 2019
    Applicant: TDK CORPORATION
    Inventors: Tadamasa IWAMOTO, Jun EMOTO
  • Patent number: 9929033
    Abstract: In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container can be filled with a cleaning gas without inclining the purging container. A control means drives a nozzle driving mechanism to move a purge nozzle toward a purge port based on a fixing detection signal detected by a fixing detection sensor showing that the purging container is fixed on a table.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: March 27, 2018
    Assignee: TDK CORPORATION
    Inventors: Jun Emoto, Tadamasa Iwamoto
  • Patent number: 9833817
    Abstract: A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 capable of detachably contacting with an intake port 5 on a tip portion of the pivotable body 31. The ring-shaped O-ring 33 is held between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28 in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection 28b.
    Type: Grant
    Filed: May 27, 2016
    Date of Patent: December 5, 2017
    Assignee: TDK Corporation
    Inventors: Mutsuo Sasaki, Jun Emoto, Hiroshi Igarashi
  • Patent number: 9786531
    Abstract: A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in a ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 formed on a tip portion of the pivotable body 31 to be able to detachably contact with the intake port 5. The ring-shaped O-ring 35 is held to be compressively elastically deformable along a longitudinal direction of the cylindrical projection 28b between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28.
    Type: Grant
    Filed: November 26, 2014
    Date of Patent: October 10, 2017
    Assignee: TDK Corporation
    Inventors: Mutsuo Sasaki, Jun Emoto, Hiroshi Igarashi
  • Publication number: 20170025296
    Abstract: In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container can be filled with a cleaning gas without inclining the purging container. A control means drives a nozzle driving mechanism to move a purge nozzle toward a purge port based on a fixing detection signal detected by a fixing detection sensor showing that the purging container is fixed on a table.
    Type: Application
    Filed: March 31, 2016
    Publication date: January 26, 2017
    Inventors: Jun EMOTO, Tadamasa IWAMOTO
  • Publication number: 20170025299
    Abstract: A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 capable of detachably contacting with an intake port 5 on a tip portion of the pivotable body 31. The ring-shaped O-ring 33 is held between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28 in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection 28b.
    Type: Application
    Filed: May 27, 2016
    Publication date: January 26, 2017
    Inventors: Mutsuo SASAKI, Jun EMOTO, Hiroshi IGARASHI
  • Patent number: 9543177
    Abstract: An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: January 10, 2017
    Assignee: TDK Corporation
    Inventors: Toshihiko Miyajima, Tadamasa Iwamoto, Jun Emoto
  • Patent number: 9536765
    Abstract: A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: January 3, 2017
    Assignee: TDK Corporation
    Inventors: Tadamasa Iwamoto, Jun Emoto, Toshihiko Miyajima, Hidenori Tsutsui
  • Publication number: 20160207082
    Abstract: A gas purge unit 20 introduces a cleaning gas into a purging container 2 with an opening 2b therethrough. The gas purge unit 20 includes a first nozzle outlet 26 and a second nozzle outlet 28. The first nozzle outlet 26 blows out the cleaning gas from a lateral side line part of the opening 2b toward the inside of the purging container 2. The second nozzle outlet 28 blows out the cleaning gas from the lateral side line part of the opening 2b toward an opening surface of the opening 2b.
    Type: Application
    Filed: November 19, 2015
    Publication date: July 21, 2016
    Inventors: Tadamasa IWAMOTO, Jun EMOTO
  • Patent number: 9349627
    Abstract: Adjacent to an opening portion in an FISM system is provided an enclosure that encloses the operation space of a door and has a second opening portion opposed to the opening portion. A curtain nozzle is provided above the upper edge of the opening portion in the upper portion in the enclosure. A purge gas is supplied from the curtain nozzle along a direction from the upper edge to the lower edge of the opening portion. In addition, a gas outlet through which the purge gas flows from the interior of the enclosure out into the exterior is provided on the wall of the enclosure to which the purge gas flowing in the above described direction is directed, whereby an increase in the partial pressure of oxidizing gases in the interior of the FOUP is prevented.
    Type: Grant
    Filed: July 27, 2010
    Date of Patent: May 24, 2016
    Assignee: TDK CORPORATION
    Inventors: Tsutomu Okabe, Jun Emoto
  • Publication number: 20160038982
    Abstract: A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in a ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 formed on a tip portion of the pivotable body 31 to be able to detachably contact with the intake port 5. The ring-shaped O-ring 35 is held to be compressively elastically deformable along a longitudinal direction of the cylindrical projection 28b between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28.
    Type: Application
    Filed: November 26, 2014
    Publication date: February 11, 2016
    Inventors: Mutsuo SASAKI, Jun Emoto, Hiroshi Igarashi
  • Patent number: 9153468
    Abstract: To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: October 6, 2015
    Assignee: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Publication number: 20150243538
    Abstract: An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.
    Type: Application
    Filed: February 27, 2015
    Publication date: August 27, 2015
    Applicant: TDK Corporation
    Inventors: Toshihiko MIYAJIMA, Tadamasa IWAMOTO, Jun EMOTO
  • Publication number: 20150214078
    Abstract: To prevent an increase with the passage of time in partial pressure of oxidizing gas in a FOUP, which is fixed to a FIMS system in an open state, a gas feed port is arranged on a lower surface of the FOUP so as to feed nitrogen to an inside of the FOUP through the gas feed port in a state where the FOUP is mounted on the FIMS system, in addition to nitrogen purge from an opening of the FOUP. A nitrogen feed system, which feeds nitrogen in a state where the FOUP is mounted on the FIMS system, is controlled so as to feed nitrogen at a low flow rate and a low pressure capable of suppressing the stirring-up of dust, which has a size that may cause a problem in wiring to be formed on a wafer, from the gas feed port and the like.
    Type: Application
    Filed: January 26, 2015
    Publication date: July 30, 2015
    Applicant: TDK Corporation
    Inventors: Tadamasa IWAMOTO, Jun EMOTO
  • Publication number: 20150194328
    Abstract: Provided is a load port apparatus capable of suppressing leakage of an inert gas from a mini-environment. The load port apparatus includes: a main base configured to partition the mini-environment from an external space, the main base including an opening portion facing an opening of a pod and communicating the mini-environment to the external space; and a door configured to open and close the opening portion and hold a lid. With this, wafers are insertable and removable between the pod and the mini-environment. The load port apparatus further includes a flexible sealing plate arranged so as to project from the main base toward an inside of the opening portion, the flexible sealing plate being configured to abut against an abutment surface surrounding the opening of the pod.
    Type: Application
    Filed: December 29, 2014
    Publication date: July 9, 2015
    Applicant: TDK Corporation
    Inventors: Jun EMOTO, Tadamasa IWAMOTO
  • Patent number: 8978718
    Abstract: To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: March 17, 2015
    Assignee: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Publication number: 20140363258
    Abstract: A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.
    Type: Application
    Filed: May 30, 2014
    Publication date: December 11, 2014
    Applicant: TDK Corporation
    Inventors: Tadamasa Iwamoto, Jun Emoto, Toshihiko Miyajima, Hidenori Tsutsui
  • Publication number: 20140157722
    Abstract: The partial pressure of an oxidizing gas within a FOUP fixed to a FIMS system and placed in an open state is prevented from increasing with the lapse of time. To that end, a gas supply port is arranged in the bottom face of the FOUP to enable nitrogen supply into the FOUP through the gas supply port with a pod mounted on the FIMS system. A nitrogen supply system for supplying nitrogen with the FOUP mounted is controlled so as to make a nitrogen supply at such a low flow rate and pressure as to be able to prevent dust or the like having such sizes as to possibly cause problems in wiring lines to be formed on a wafer from being stirred up from the gas supply port or the like.
    Type: Application
    Filed: December 3, 2013
    Publication date: June 12, 2014
    Applicant: TDK Corporation
    Inventors: Tadamasa IWAMOTO, Jun Emoto, Toshihiko Miyajima
  • Publication number: 20130042945
    Abstract: To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
    Type: Application
    Filed: August 14, 2012
    Publication date: February 21, 2013
    Applicant: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima