Patents by Inventor Jun Goo PARK

Jun Goo PARK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER CLEANING APPARATUS AND METHOD OF CONTROLLING THE SAME
    Publication number: 20220344194
    Abstract: A wafer cleaning apparatus of the present invention includes a vacuum chuck unit on which a wafer is mounted, a ring cover unit facing a retainer ring portion of the wafer, an expander module installed to move the ring cover unit and configured to press the retainer ring portion toward the vacuum chuck unit such that a gap between dies of the wafer widens, and a chucking module installed in the vacuum chuck unit to restrain the ring cover unit pressed by the expander module to the vacuum chuck unit.
    Type: Application
    Filed: April 12, 2022
    Publication date: October 27, 2022
    Applicant: ZEUS CO., LTD.
    Inventors: Seung Dae BAEK, Kuem Dong HEO, Sung Yup KIM, Jae Hwan SON, Nam Jin KIM, Jun Goo PARK
  • WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD
    Publication number: 20220344196
    Abstract: A wafer processing apparatus of the present invention includes a first chamber unit in which a first wafer part including a retainer ring portion and a plurality of sawn first dies is processed, a second chamber unit in which a second wafer part including a wafer part or a carrier substrate is processed, and a third chamber unit in which the first dies of the first wafer part processed in the first chamber unit and the second wafer part processed in the second chamber unit are stacked and pre-bonded.
    Type: Application
    Filed: April 14, 2022
    Publication date: October 27, 2022
    Applicant: ZEUS CO., LTD.
    Inventors: Seung Dae BAEK, Sung Yup KIM, Jun Goo PARK