Abstract: The present disclosure relates to a substrate treatment apparatus including: a chuck base connected to a driving shaft in such a way as to be rotatable together with the driving shaft and having a spin chuck with chuck pins disposed on top thereof to support a substrate and a chuck support part; a fluid supply unit for supplying treatment liquid to top of the substrate; a back nozzle assembly mounted through a hollow portion formed at the center of the chuck base to spray treatment liquid onto the underside of the substrate; cover glass disposed between the spin chuck and the back nozzle assembly; a heating part disposed between the spin chuck and the back nozzle assembly in a space between the cover glass and the chuck support part; and a heat sink located to come into contact with the underside of the heating part.

Abstract: The present invention provides a method of carbonating carbon dioxide with high purity using a paper mill waste sludge by preparing a paper mill waste sludge which is a waste product discharged during the production of papermaking, adding acid to the paper mill waste sludge and reacting the acid therewith to produce a mixed solution and stirring, separating a supernatant of the mixed solution into an eluate, adding a basic substance to the eluate and adjusting pH to precipitate some of the ions in the eluate, and then adding a reaction initiator to the eluate in which some ions are precipitated and removed, and injecting carbon dioxide for a carbonation reaction.

Abstract: The present invention provides a method of carbonating carbon dioxide with high purity using a paper mill waste sludge by preparing a paper mill waste sludge which is a waste product discharged during the production of papermaking, adding acid to the paper mill waste sludge and reacting the acid therewith to produce a mixed solution and stirring, separating a supernatant of the mixed solution into an eluate, adding a basic substance to the eluate and adjusting pH to precipitate some of the ions in the eluate, and then adding a reaction initiator to the eluate in which some ions are precipitated and removed, and injecting carbon dioxide for a carbonation reaction.

Abstract: Provided is a surface modification method of calcite powder prepared from desulfurized gypsum and heat-treated at a high temperature. According to the surface modification method, hydrophilic calcite powder having polarity may be changed into hydrophobic non-polar calcite powder by safely adsorbing a surface modifier onto a surface of the calcite powder and coating the surface with non-polar fatty acid. Particularly, in the case in which calcite powder heat-treated at a high temperature is hydrophobized, a significantly excellent hydrophobic surface property may be implemented.

Abstract: Disclosed is a method of detoxifying asbestos of waste slate. The method includes concentrating the asbestos by introducing hydrochloric acid aqueous solution into waste slate powder to dissolve and remove a limestone component contained in the waste slate; and mixing the concentrated asbestos with oxalic acid and performing a low-temperature heat treatment. The waste slate is crushed and pulverized and powder of the crushed and pulverized waste slate is formed in a size in a range of 100 meshes to 300 meshes. The detoxified asbestos includes re-crystallized magnesium oxalate having a rhombohedral or amorphous shape.

Abstract: Provided is a method of synthesizing high-purity calcite capable of controlling a grain size thereof, by reacting an aqueous calcium chloride solution with CO2 gas under strong alkaline condition, to crystallize into white and ultra-fine grain calcite. The method of synthesizing fine-grain calcite according to the present disclosure can decrease super-saturation by producing calcite under the strong alkaline conditions, thereby suppressing generation and growth of grain, resulting in controlling the grain size. Therefore, the above method is useful in producing high-purity ultra-fine grain calcite and can control the grain size of calcite from several hundreds of nanometers to several tens of nanometers by regulating the concentration of an aqueous caustic soda solution.

Abstract: Disclosed is a method of detoxifying asbestos of waste slate. The method includes concentrating the asbestos by introducing hydrochloric acid aqueous solution into waste slate powder to dissolve and remove a limestone component contained in the waste slate; and mixing the concentrated asbestos with oxalic acid and performing a low-temperature heat treatment. The waste slate is crushed and pulverized and powder of the crushed and pulverized waste slate is formed in a size in a range of 100 meshes to 300 meshes. The detoxified asbestos includes re-crystallized magnesium oxalate having a rhombohedral or amorphous shape.

Abstract: Provided is a method for fixing carbon dioxide, the method includding: pulverizing furnace slag; mixing water and the furnace slag such that the furnace slag is present in a concentration of 5˜15 parts by weight based on 100 parts by weight of water; adding NaOH to the mixture; and supplying carbon dioxide to the decomposed mixture, and then carrying out a hydrothermal reaction, so that carbon dioxide can be stably fixed; the treatment of the furnace slag can lead to ecofriendly effects; and the use of the furnace slag can lead to production of carbonate minerals as the final product.

Abstract: Disclosed herein is a method of producing carbonate, comprising the steps of: providing a water-containing solution including cations that are precipitated in the form of a salt after undergoing a precipitation reaction with carbonate ions; and generating carbon dioxide microbubbles having a diameter of 50 ?m or less in the water-containing solution to induce the precipitation reaction between the cations and the carbonate ions. The method is advantageous in that the carbonate produced using the microbubble system disclosed in the method can be practically used as high-priced building materials, filler for paper manufacturing, etc. and can also be used in foods, medicines and the like depending on the purity thereof, so that it can be recovered in a high yield. Further, the method is advantageous in that carbon dioxide is consumed, and cations can be effectively removed from waste water, so that it is environmentally useful.

Abstract: Provided is a method of synthesizing high-purity calcite capable of controlling a grain size thereof, by reacting an aqueous calcium chloride solution with CO2 gas under strong alkaline condition, to crystallize into white and ultra-fine grain calcite. The method of synthesizing fine-grain calcite according to the present disclosure can decrease super-saturation by producing calcite under the strong alkaline conditions, thereby suppressing generation and growth of grain, resulting in controlling the grain size. Therefore, the above method is useful in producing high-purity ultra-fine grain calcite and can control the grain size of calcite from several hundreds of nanometers to several tens of nanometers by regulating the concentration of an aqueous caustic soda solution.

Abstract: Disclosed herein is a method of producing carbonate, comprising the steps of: providing a water-containing solution including cations that are precipitated in the form of a salt after undergoing a precipitation reaction with carbonate ions; and generating carbon dioxide microbubbles having a diameter of 50 ?m or less in the water-containing solution to induce the precipitation reaction between the cations and the carbonate ions. The method is advantageous in that the carbonate produced using the microbubble system disclosed in the method can be practically used as high-priced building materials, filler for paper manufacturing, etc. and can also be used in foods, medicines and the like depending on the purity thereof, so that it can be recovered in a high yield. Further, the method is advantageous in that carbon dioxide is consumed, and cations can be effectively removed from waste water, so that it is environmentally useful.