Abstract: Disclosed is a lift pin assembly, including: a lift pin inserted into a pin hole; a moving plate moving up and down by a driving unit; a bellows module including a lower flange supported by the moving plate and a bellows shaft supporting the lift pins; and a pressurizing member provided between the lower flange and the moving plate to apply constant pressure in a lifting direction of the bellows module.

Abstract: A substrate support unit includes a substrate support member that supports a substrate, the substrate support member being provided with one or more pin holes vertically penetrating the substrate support member, and a lift pin assembly provided to be lifted along a corresponding pin hole. The lift pin assembly includes lift pins, each lift pin having an upper end contacting the substrate and supporting the substrate, and a pin drive unit that is coupled to the lift pins and lifts the lift pins. The pin drive unit includes piezoelectric motors below the lift pins, respectively.

Abstract: A substrate lifting apparatus and a substrate processing apparatus for reducing deformation due to heat are provided. The substrate lifting apparatus comprises a plurality of pins in contact with a substrate, an upper plate for supporting the plurality of pins and having a plurality of upper connecting portions formed on a lower surface, a lower plate having a plurality of lower connecting portions connected to the plurality of upper connecting portions formed on an upper surface and disposed under the upper plate, and a driving unit for driving the plurality of pins to move up and down, wherein the lower plate supports a plurality of bushes and a plurality of shafts passing through the plurality of bushes on an upper surface thereof.

Abstract: A prism sheet, capable of enhancing wet-out ability in a whole back light unit while maintaining center brightness, transmittance and haze in good condition, is disclosed. The prism sheet includes a base film made of a transparent material and having a flat first surface, and a light refracting part including a plurality of unit prisms unitarily formed with the base film on a second surface of the base film, opposite to the flat first surface. The unit prisms have a predetermined shape of a cross section, and are arranged with orientation. When an angle formed between a ridge of the unit prism of the light refracting part and a normal line of the flat first surface is defined as ?n, ?n and ?n+1 have different values from each other, and n is an integer more than 2. An LCD back light unit using the above prism sheet is also disclosed.

Abstract: A diffuser prism sheet, an LCD back light unit including the same, and an LCD device including the same, the diffuser prism sheet including a base film made of a transparent material, and a light refracting part on a surface of the base film, the light refracting part including a plurality of unit prisms arranged in one direction, having a predetermined cross-sectional shape and valley regions between adjacent unit prisms, and light diffusing elements in the valley regions between the adjacent unit prisms.

Abstract: An optical prism sheet includes an optical refracting part including a plurality of unit prisms, the unit prisms each having a predetermined cross-section and being disposed on one side of the optical prism sheet, and fine irregularities having a predetermined roughness and configured to diffuse light, the fine irregularities being on surfaces of the unit prisms and increasing a unit surface area of the optical refracting part by about 1.1 to about 100 times.

Abstract: A prism sheet includes a transparent base film with first and second surfaces and an optical refracting part with a plurality of prism units on the second surface, wherein the prism units are integral with the transparent base film, each prism unit having a predetermined height and extending along a first direction on the second surface of the transparent base film, wherein each prism unit includes a ridge extending along the first direction, a distance along a normal between the second surface of the transparent base film and the ridge defining the predetermined height of the prism unit, and wherein at least two prism units include ridges inclined at a predetermined angle other than zero with respect to the second surface of the transparent base film, the inclined ridges being unevenly distributed on the second surface of the transparent base film.

Abstract: A diffuser prism sheet includes a transparent base film having a first surface and a second surface, a light refractor at the first surface of the base film, the light refractor including a plurality of unit prisms having a major axis extending in a first direction and having a predetermined cross sectional shape that defines valleys between adjacent unit prisms, and light diffusers including amorphous polygonal bosses in the valleys between adjacent unit prisms.

Abstract: An optical prism sheet includes an optical refracting part including a plurality of unit prisms, the unit prisms each having a predetermined cross-section and being disposed on one side of the optical prism sheet, and fine irregularities having a predetermined roughness and configured to diffuse light, the fine irregularities being on surfaces of the unit prisms and increasing a unit surface area of the optical refracting part by about 1.1 to about 100 times.

Abstract: A prism sheet, capable of enhancing wet-out ability in a whole back light unit while maintaining center brightness, transmittance and haze in good condition, is disclosed. The prism sheet includes a base film made of a transparent material and having a flat first surface, and a light refracting part including a plurality of unit prisms unitarily formed with the base film on a second surface of the base film, opposite to the flat first surface. The unit prisms have a predetermined shape of a cross section, and are arranged with orientation. When an angle formed between a ridge of the unit prism of the light refracting part and a normal line of the flat first surface is defined as ?n, ?n and ?n+1 have different values from each other, and n is an integer more than 2.

Abstract: A diffuser prism sheet, an LCD back light unit including the same, and an LCD device including the same, the diffuser prism sheet including a base film made of a transparent material, and a light refracting part on a surface of the base film, the light refracting part including a plurality of unit prisms arranged in one direction, having a predetermined cross-sectional shape and valley regions between adjacent unit prisms, and light diffusing elements in the valley regions between the adjacent unit prisms.

Abstract: A prism sheet includes a transparent base film with first and second surfaces and an optical refracting part with a plurality of prism units on the second surface, wherein the prism units are integral with the transparent base film, each prism unit having a predetermined height and extending along a first direction on the second surface of the transparent base film, wherein each prism unit includes a ridge extending along the first direction, a distance along a normal between the second surface of the transparent base film and the ridge defining the predetermined height of the prism unit, and wherein at least two prism units include ridges inclined at a predetermined angle other than zero with respect to the second surface of the transparent base film, the inclined ridges being unevenly distributed on the second surface of the transparent base film.

Abstract: A diffuser prism sheet includes a transparent base film having a first surface and a second surface, a light refractor at the first surface of the base film, the light refractor including a plurality of unit prisms having a major axis extending in a first direction and having a predetermined cross sectional shape that defines valleys between adjacent unit prisms, and light diffusers including amorphous polygonal bosses in the valleys between adjacent unit prisms.

Abstract: A photopolymerizable resin composition for sandblast resist includes as a photopolymerizable oligomer, a polyalkylene glycol mono(meth)acrylate compound having a terminal alkyl group, a compound selected from polyalkylene glycol di(meth)acrylate compounds, and further a compound selected from urethane compounds having a terminal (meth)acrylate group as derived from a polyether or polyester compound having a terminal hydroxyl group, a diisocyanate compound and a (meth)acrylate compound having a hydroxyl group. The resist containing the photopolymerizable resin composition exhibits much improved reactivity relative to the resist using a urethane compound having a terminal (meth)acrylate group alone or in combination with an unsaturated (meth)acrylate compound, which has been conventionally used for dry films.

Abstract: Disclosed is a manufacturing method of a circuit of a printed circuit board using a dry film resist in forming a circuit pattern on a copper overlaid laminate as a normal printed circuit board, in which a modification of the manufacturing process can enhance the resolution and fine weldability of the resist to realize a fine structure of the circuit pattern. The method includes: laminating the dry film resist on the top surface of the printed circuit board; exposing the dry film resist to ultraviolet (UV) radiations using a photomask in which a desired circuit pattern is formed; annealing the resulting material of the previous step with infrared (IR) radiations; and removing unexposed areas of the resist by development.

Abstract: Disclosed is a manufacturing method of a circuit of a printed circuit board using a dry film resist in forming a circuit pattern on a copper overlaid laminate as a normal printed circuit board, in which a modification of the manufacturing process can enhance the resolution and fine weldability of the resist to realize a fine structure of the circuit pattern. The method includes: laminating the dry film resist on the top surface of the printed circuit board; exposing the dry film resist to ultraviolet (UV) radiations using a photomask in which a desired circuit pattern is formed; annealing the resulting material of the previous step with infrared (IR) radiations; and removing unexposed areas of the resist by development.