Abstract: By measuring, for an ultra-low-expansion glass material, the frequency dependence of acoustic velocities and attenuation coefficients of bulk waves (longitudinal waves and shear waves), and the density, its fundamental acoustic properties are revealed, and a standard specimen for use in system calibration is prepared. By an absolute calibration method using the standard specimen, absolute values for both the LSAW and LSSCW velocities are obtained. Moreover, there are obtained relationships for the acoustic properties and the coefficient of thermal expansion to evaluate the coefficient of thermal expansion from the acoustic properties. In case there is a distribution of characteristics due to periodic striae, an accurate acoustic property distribution in the substrate can be ascertained and an evaluation performed, by selecting for the substrate a cutting angle with respect to the striae plane.

Abstract: A measuring system including a linear gauge 8 is placed on a vibration isolation table 7, and this system assembly is placed in a temperature controllable, constant-temperature chamber. A specimen table 16, which has a centrally-disposed circular protrusion 16C of a diameter sufficiently smaller than a specimen under measurement, is mounted on a surface plate 2 of a linear gauge 8. The position of a measuring element 1 is measured when it is brought into contact with the centrally-disposed circular protrusion 16C, and the position of the measuring element 1 is measured when it is brought into contact with the specimen placed on the specimen table. The measured values are used to determine the thickness of the specimen.

Abstract: All independent acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants and density) of a material are predetermined as a function of its chemical composition, and the calibration line between the acoustic velocity for each of the substrate crystal plane, the propagation direction and the propagation mode, and other chemical and physical properties is numerically calculated with ease without making any experiments.

Abstract: The temperature distribution in water is measured by two thermocouples to obtain a temperature compensating parameter. Under measurement conditions where the temperature distribution in water varies, a measured V(z) curve is used to monitor a change in the wave number of a longitudinal wave in an ultrasonic wave propagation region in water to thereby detect variations in the water temperature and the longitudinal wave velocity with high accuracy.

Abstract: A measuring system including a linear gauge 8 is placed on a vibration isolation table 7, and this system assembly is placed in a temperature controllable, constant-temperature chamber. A specimen table 16, which has a centrally-disposed circular protrusion 16C of a diameter sufficiently smaller than a specimen under measurement, is mounted on a surface plate 2 of a linear gauge 8. The position of a measuring element 1 is measured when it is brought into contact with the centrally-disposed circular protrusion 16C, and the position of the measuring element 1 is measured when it is brought into contact with the specimen placed on the specimen table. The measured values are used to determine the thickness of the specimen.

Abstract: All independent acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants and density) of a material are predetermined as a function of its chemical composition, and the calibration line between the acoustic velocity for each of the substrate crystal plane, the propagation direction and the propagation mode, and other chemical and physical properties is numerically calculated with ease without making any experiments.

Abstract: The temperature distribution in water is measured by two thermocouples to obtain a temperature compensating parameter. Under measurement conditions where the temperature distribution in water varies, a measured V(Z) curve is used to monitor a change in the wave number of a longitudinal wave in an ultrasonic wave propagation region in water to thereby detect variations in the water temperature and the longitudinal wave velocity with high accuracy.