Patents by Inventor Jun Iljima

Jun Iljima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Template, template component, and semiconductor device manufacturing method
    Patent number: 10879137
    Abstract: According to an embodiment, a template includes a flat plate-shaped first member, a flat plate-shaped second member including a pattern arrangement face, and a flat plate-shaped third member provided with an opening at a position corresponding to an arrangement position of the second member. The template is dividable at a position of at least one of a first boundary between the first member and the second member and a second boundary between the first member and the third member.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: December 29, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Takahito Nishimura, Suigen Kanda, Takamasa Usui, Masayoshi Tagami, Jun Iljima