Abstract: A transfer robot includes a movable mechanism, a support base moved by the movable mechanism, a horizontal arm pivotable relative to the support base around a first vertical axis, a motor in the horizontal arm to pivot the arm, and a hand disposed above the arm and rotatable relative to the arm around a second axis parallel to the first axis. The hand holds a planar workpiece placed thereon. The arm includes a rotation stage for holding the planar workpiece placed thereon. The rotation stage is rotatable around a third axis parallel to the first axis and movable vertically along the third axis. The hand has a holding center corresponding to the center of the planar workpiece, where the holding center is moved along a rotational trajectory extending across the third axis in plan view. The rotation stage is rotated by the motor provided in the horizontal arm.

Abstract: An aligner includes a first rotation drive mechanism, a second rotation drive mechanism and an elevation mechanism. The first rotation drive mechanism includes a first support portion that supports a workpiece, and a first drive source for rotatively driving the first support portion about a first vertical axis. The second rotation drive mechanism includes a second support portion that supports the workpiece, and a second drive source for rotatively driving the second support portion about a second vertical axis. The elevation mechanism is configured to move the workpiece supported by the second support portion up and down.

Abstract: A transfer robot includes a support unit, a rotary base supported by the support unit, a rotation mechanism that rotates the rotary base, a hand unit supported by the rotary base and configured to support a work, and a linear movement mechanism that moves the hand unit in a horizontal direction relative to the rotary base. The rotation mechanism includes a first rotation mechanism that rotates the rotary base relative to the support unit about a first rotation axis extending in a vertical direction, and a second rotation mechanism that rotates the rotary base about a second rotation axis inclined by a predetermined angle with respect to the first rotation axis. The support unit includes a pivotal member that pivots about a pivotal axis perpendicular to the first rotation axis.

Abstract: A transfer robot includes a support unit, a rotary base supported by the support unit, a rotation mechanism that rotates the rotary base, a hand unit supported by the rotary base and configured to support a work, and a linear movement mechanism that moves the hand unit in a horizontal direction relative to the rotary base. The rotation mechanism includes a first rotation mechanism that rotates the rotary base relative to the support unit about a first rotation axis extending in a vertical direction, and a second rotation mechanism that rotates the rotary base about a second rotation axis inclined by a predetermined angle with respect to the first rotation axis. The support unit includes a pivotal member that pivots about a pivotal axis perpendicular to the first rotation axis.

Abstract: A transfer apparatus includes a base, a first holder, a second holder offset from the first holder in a first direction, and a movement mechanism for moving the first holder and the second holder relative to the base in a plane parallel to the first direction. The movement mechanism includes a swing member, a first link arm and a second link arm. The swing member is pivotally supported on the base. The first link arm is pivotally connected to the first holder. The first link arm is also connected to the swing member for pivoting about a first intermediate axis extending in a second direction perpendicular to the first direction. The second link arm is pivotally connected to the second holder. The second link arm is also connected to the swing member for pivoting about a second intermediate axis extending in the second direction. The first intermediate axis is offset from the second intermediate axis in the first direction.

Abstract: A transfer apparatus includes a base, a first holder, a second holder offset from the first holder in a first direction, and a movement mechanism for moving the first holder and the second holder relative to the base in a plane parallel to the first direction. The movement mechanism includes a swing member, a first link arm and a second link arm. The swing member is pivotally supported on the base. The first link arm is pivotally connected to the first holder. The first link arm is also connected to the swing member for pivoting about a first intermediate axis extending in a second direction perpendicular to the first direction. The second link arm is pivotally connected to the second holder. The second link arm is also connected to the swing member for pivoting about a second intermediate axis extending in the second direction. The first intermediate axis is offset from the second intermediate axis in the first direction.

Abstract: A transfer apparatus includes a base, a first holder, a second holder offset from the first holder in a first direction, and a movement mechanism for moving the first holder and the second holder relative to the base in a plane parallel to the first direction. The movement mechanism includes a swing member, a first link arm and a second link arm. The swing member is pivotally supported on the base. The first link arm is pivotally connected to the first holder. The first link arm is also connected to the swing member for pivoting about a first intermediate axis extending in a second direction perpendicular to the first direction. The second link arm is pivotally connected to the second holder. The second link arm is also connected to the swing member for pivoting about a second intermediate axis extending in the second direction. The first intermediate axis is offset from the second intermediate axis in the first direction.

Abstract: A transfer apparatus capable of suppressing dust generation and reducing the manufacturing cost thereof is provided. In a transfer apparatus including a transfer unit which moves on a rail to transfer an object and an arm mechanism which transmits the power from a drive source to the transfer unit, the arm mechanism includes a rotatable driving arm with one end thereof connected to the drive source, a driven arm with one end thereof connected to the transfer unit, and a gear mechanism which connects the other end of the driven arm to the other end of the driving arm and transmits the rotation of the driving arm to the driven arm.

Abstract: A workpiece conveying robot includes a base unit, a moving unit configured to move with respect to the base unit, a driving mechanism that drives the moving unit, and a detection unit. The moving unit includes a hand on which a workpiece is to be placed. The detection unit serves to detect information about the workpiece. Specifically, the detection unit includes a sensor provided at the hand, a base unit-side terminal provided at the base unit, and a moving unit-side terminal provided at the moving unit and electrically connected to the sensor. The base unit-side terminal and the moving unit-side terminal are brought into contact with each other when the moving unit is at a predetermined position.

Abstract: A transfer apparatus includes a base, a first holder, a second holder offset from the first holder in a first direction, and a movement mechanism for moving the first holder and the second holder relative to the base in a plane parallel to the first direction. The movement mechanism includes a swing member, a first link arm and a second link arm. The swing member is pivotally supported on the base. The first link arm is pivotally connected to the first holder. The first link arm is also connected to the swing member for pivoting about a first intermediate axis extending in a second direction perpendicular to the first direction. The second link arm is pivotally connected to the second holder. The second link arm is also connected to the swing member for pivoting about a second intermediate axis extending in the second direction. The first intermediate axis is offset from the second intermediate axis in the first direction.

Abstract: A workpiece conveying robot includes a base unit, a moving unit configured to move with respect to the base unit, a driving mechanism that drives the moving unit, and a detection unit. The moving unit includes a hand on which a workpiece is to be placed. The detection unit serves to detect information about the workpiece. Specifically, the detection unit includes a sensor provided at the hand, a base unit-side terminal provided at the base unit, and a moving unit-side terminal provided at the moving unit and electrically connected to the sensor. The base unit-side terminal and the moving unit-side terminal are brought into contact with each other when the moving unit is at a predetermined position.