Abstract: The present disclosure provides a substrate conveyance method in a substrate processing apparatus including a first mechanism configured to hold the substrate by a first method in a processing device configured to process a substrate, and a second mechanism configured to convey the substrate to the first mechanism while holding the substrate by a second method different from the first method, the method comprising: obtaining first information representing a shape of the substrate in a case where the first method is used; obtaining second information representing a shape of the substrate in a case where the second method is used; and conveying the substrate to the first mechanism via the second mechanism based on the first information and the second information.

Abstract: An exposure apparatus that performs an exposure operation of exposing a substrate via a projection optical system is provided. The apparatus includes a temperature regulator configured to regulate a temperature distribution on an optical element of the projection optical system, and a controller configured to perform, in an exposure operation period in which the exposure operation is executed, a first process of controlling the temperature regulator so as to reduce a change of aberration of the projection optical system caused by execution of the exposure operation. In accordance with detection of a predetermined event before the exposure operation period, the controller performs, before performing the first process, a second process for reducing the aberration of the projection optical system using a method different from the first process.

Abstract: An exposure apparatus that performs an exposure operation of exposing a substrate via a projection optical system is provided. The apparatus includes a temperature regulator configured to regulate a temperature distribution on an optical element of the projection optical system, and a controller configured to perform, in an exposure operation period in which the exposure operation is executed, a first process of controlling the temperature regulator so as to reduce a change of aberration of the projection optical system caused by execution of the exposure operation. In accordance with detection of a predetermined event before the exposure operation period, the controller performs, before performing the first process, a second process for reducing the aberration of the projection optical system using a method different from the first process.

Abstract: There are provided (I) a process for producing a copolymer of ethylene, an ?-olefin having from 3 to 20 carbon atoms and optionally a polyene, which comprises the step of copolymerizing those monomers in a polymerization reactor by feeding the following components (A), (B), (C1) and (D) to the polymerization reactor: (A) a transition metal complex, (B) an organic aluminum compound, (C1) a halogen-containing compound, and (D) a Lewis base, wherein those components are fed to the polymerization reactor without a preliminary contact of (1) the component (A) with the component (B), (2) the component (A) with the component (C1), (3) the component (B) with the component (C1), and (4) the component (B) with the component (D); and (II) a process for producing said copolymer, which comprises the step of copolymerizing those monomers in a polymerization reactor (i) by feeding to the polymerization reactor the components (A), (B), (D), (C2) a halogen-containing compound, which is a derivative of an aryl group-contai

Abstract: An exposure apparatus for exposing a substrate to radiant energy comprises a controller configured to determine a shot layout based on data representing a surface shape of the substrate, and an exposure unit configured to expose the substrate to the radiant energy in accordance with the shot layout determined by the controller.

Abstract: There are provided (I) a process for producing a copolymer of ethylene, an ?-olefin having from 3 to 20 carbon atoms and optionally a polyene, which comprises the step of copolymerizing those monomers in a polymerization reactor by feeding the following components (A), (B), (C1) and (D) to the polymerization reactor: (A) a transition metal complex, (B) an organic aluminum compound, (C1) a halogen-containing compound, and (D) a Lewis base, wherein those components are fed to the polymerization reactor without a preliminary contact of (1) the component (A) with the component (B), (2) the component (A) with the component (C1), (3) the component (B) with the component (C1), and (4) the component (B) with the component (D); and (II) a process for producing said copolymer, which comprises the step of copolymerizing those monomers in a polymerization reactor (i) by feeding to the polymerization reactor the components (A), (B), (D), (C2) a halogen-containing compound, which is a derivative of an aryl group-contai

Abstract: A switching apparatus includes an identification device for identifying received real-time packets; a measurement device for measuring a reception interval of the real-time packets according to the identification identified by the identification device; and an output device for giving priority to the real-time packets over other types of packets and outputting the real-time packet by priority based on the measurement measured by the measurement device.

Abstract: Disclosed is a process for producing an ethylene-?-olefin copolymer excellent in balancing between strength and elongation by continuous multi-step polymerization. The process comprises continuously polymerizing ethylene and ?-olefin in a solvent in the presence of an olefin polymerization catalyst using a polymerization reaction apparatus comprising two or more tanks of polymerization reactors connected in series, said process including a first polymerization step of producing in one tank of polymerization reactor a polymer component under the polymerization condition of a flow state being 1.5 or more tanks in the perfect mixing cell model, and a second polymerization step of producing in one tank of polymerization reactor a polymer component under specific polymerization conditions.

Abstract: A delay in packet output due to packet fragmentation processing is reduced. If input data is output upon being subjected to fragmentation processing, fragmented data, from among a plurality of fragmented data items fragmented based upon a set value in an MTU register, which belongs to a first fragmented packet containing information that is based upon all fragmented packets is stored in a fragment buffer. After all fragmented packets from a second fragmented packet onward to which other fragmented data items belong are output, the first fragmented packet is output.

Abstract: The present invention provides a process for producing an ethylene-?-olefin-unconjugated polyene random copolymer in an aliphatic hydrocarbon solvent under conditions of high-temperature and high-activity. The process comprises polymerizing at least the following components (a)-(c) in an aliphatic hydrocarbon solvent in the presence of a catalyst comprising (A) a transition metal complex having at least one cyclopentadienyl skeleton and (B) an organoaluminum compound and (C) a boron compound as co-catalysts wherein at least a part of the polyene (c) and at least a part of the boron compound (C) are previously contacted with each other before they are introduced into a polymerization reactor: (a): ethylene (b): an ?-olefin of 3-20 carbon atoms (c): a polyene.

Abstract: This invention provides a transmission system and control method capable of reliably transmitting real-time data. A switching device and router each serving as an intermediate device mediate an iso-data packet sent from each iso-data server to a predetermined terminal at a timing designated by an iso-packet from the iso-server. If a plurality of iso-data packets conflict in the transmission path, the switching device and router collectively continuously output the plurality of iso-data packets.

Abstract: A communication control device comprises a calculation part for calculating the number of frames and the frame length for transmitting the transmit data, a payload division part for dividing the transmit data into frame units based on the calculation results of the calculation part, and a header generation part for generating a header to be appended to the transmit data of frame unit based on the calculation results of the calculation part in the midst of dividing the transmit data by the payload division part. Thereby, the parallel processing ability of the hardware can be exhibited, a memory management method can be simplified, and the transmit data can be outputted as the frame at high speed.

Abstract: A delay in packet output due to packet fragmentation processing is reduced. If input data is output upon being subjected to fragmentation processing, fragmented data, from among a plurality of fragmented data items fragmented based upon a set value in an MTU register, which belongs to a first fragmented packet containing information that is based upon all fragmented packets is stored in a fragment buffer. After all fragmented packets from a second fragmented packet onward to which other fragmented data items belong are output, the first fragmented packet is output.

Abstract: An exposure apparatus for exposing a substrate to radiant energy comprises a controller configured to determine a shot layout based on data representing a surface shape of the substrate, and an exposure unit configured to expose the substrate to the radiant energy in accordance with the shot layout determined by the controller.

Abstract: Frames of different priority levels are queued in a plurality of queues, e.g., first priority queue, second priority queue and third priority queue. If it is judged that a lower priority frame can be completely transmitted by the timing of transmitting a higher-priority frame based on the frame length, the lower-priority frame is transmitted, and otherwise, the lower-priority frame is not transmitted. Accordingly, frame transmission control that is applicable to fixed-length frames and variable-length frames is realized in a frame scheduler for an apparatus having a function of outputting frames. Also, priority-based control of frames which is suitable for a layer 2 switch or the like and which is adaptable to processing in a high-speed network is realized without providing an IP fragment.

Abstract: Disclosed is a process for producing an ethylene-?-olefin copolymer excellent in balancing between strength and elongation by continuous multi-step polymerization. The process comprises continuously polymerizing ethylene and ?-olefin in a solvent in the presence of an olefin polymerization catalyst using a polymerization reaction apparatus comprising two or more tanks of polymerization reactors connected in series, said process including a first polymerization step of producing in one tank of polymerization reactor a polymer component under the polymerization condition of a flow state being 1.5 or more tanks in the perfect mixing cell model, and a second polymerization step of producing in one tank of polymerization reactor a polymer component under specific polymerization conditions.

Abstract: There are provided (I) a process for producing a copolymer of ethylene, an ?-olefin having from 3 to 20 carbon atoms and optionally a polyene, which comprises the step of copolymerizing those monomers in a polymerization reactor by feeding the following components (A), (B), (C1) and (D) to the polymerization reactor: (A) a transition metal complex, (B) an organic aluminum compound, (C1) a halogen-containing compound, and (D) a Lewis base, wherein those components are fed to the polymerization reactor without a preliminary contact of (1) the component (A) with the component (B), (2) the component (A) with the component (C1), (3) the component (B) with the component (C1), and (4) the component (B) with the component (D); and (II) a process for producing said copolymer, which comprises the step of copolymerizing those monomers in a polymerization reactor (i) by feeding to the polymerization reactor the components (A), (B), (D), (C2) a halogen-containing compound, which is a derivative of an aryl group-contai

Abstract: The present invention provides a process for producing an ethylene-?-olefin-unconjugated polyene random copolymer in an aliphatic hydrocarbon solvent under conditions of high-temperature and high-activity. The process comprises polymerizing at least the following components (a)-(c) in an aliphatic hydrocarbon solvent in the presence of a catalyst comprising (A) a transition metal complex having at least one cyclopentadienyl skeleton and (B) an organoaluminum compound and (C) a boron compound as co-catalysts wherein at least a part of the polyene (c) and at least a part of the boron compound (C) are previously contacted with each other before they are introduced into a polymerization reactor: (a): ethylene (b): an ?-olefin of 3-20 carbon atoms (c): a polyene.

Abstract: There are provided (I) a process for producing a copolymer of ethylene, an ?-olefin having from 3 to 20 carbon atoms and optionally a polyene, which comprises the step of copolymerizing those monomers in a polymerization reactor by feeding the following components (A), (B), (C1) and (D) to the polymerization reactor: (A) a transition metal complex, (B) an organic aluminum compound, (C1) a halogen-containing compound, and (D) a Lewis base, wherein those components are fed to the polymerization reactor without a preliminary contact of (1) the component (A) with the component (B), (2) the component (A) with the component (C1), (3) the component (B) with the component (C1), and (4) the component (B) with the component (D); and (II) a process for producing said copolymer, which comprises the step of copolymerizing those monomers in a polymerization reactor (i) by feeding to the polymerization reactor the components (A), (B), (D), (C2) a halogen-containing compound, which is a derivative of an aryl group-containing

Abstract: This invention provides a transmission system and control method capable of reliably transmitting real-time data. A switching device and router each serving as an intermediate device mediate an iso-data packet sent from each iso-data server to a predetermined terminal at a timing designated by an iso-packet from the iso-server. If a plurality of iso-data packets conflict in the transmission path, the switching device and router collectively continuously output the plurality of iso-data packets.