Abstract: Provided is a laser interferometer including: a laser light source configured to emit laser light; an optical modulator including a vibrator that has a light reflection surface and vibrates in response to a drive signal, the optical modulator being configured to overlap a modulation signal on the laser light by reflecting the laser light on the light reflection surface; and a photodetector configured to receive the laser light including a sample signal derived from an object and the modulation signal, and to output a light-receiving signal. When an inclination angle ?qom is defined by a normal line of the light reflection surface and an incident optical axis of the laser light incident on the light reflection surface, the following Relationship (1) is satisfied. 0[deg]<?qom<5.

Abstract: To provide a controller for rotary electric machine and an electric power steering apparatus which can set a control gain which is used for controlling the d-axis current command value based on the q-axis current deviation between the current command value of q-axis and the current detection value of q-axis, considering the response of the current of q-axis. A controller for rotary electric machine changes the current command value of d-axis, based on a value obtained by multiplying a proportional gain to a q-axis current deviation which is a deviation between the current command value of q-axis and the current detection value of q-axis; and changes the proportional gain in inverse proportion to the rotational angle speed.

Abstract: To provide an automatic driving support apparatus which can continue the automatic steering, when the abnormality of the control system of the motor for steering is detected. An automatic driving support apparatus including: an automatic steering control unit that calculates a steering angle command value of a steering apparatus of the ego vehicle based on the detected traveling state and the detected peripheral state; a motor for steering; a motor drive circuit; a steering angle control unit that calculates a motor output command value based on a steering angle command value and a steering angle detection value; a motor control unit that generates driving signals of the motor drive circuit based on the motor output command value; and an abnormality detection unit, wherein the motor control unit generates driving signals at abnormal time according to a content of abnormality related to the motor for steering.

Abstract: A laser interferometer including: a laser light source configured to output laser light; a light splitter configured to split the laser light into first split light and second split light; a light modulator configured to modulate a frequency of the first split light to generate reference light; a light receiver configured to receive object light generated by the second split light reflected off by a target object, and the reference light; and a first light collecting lens disposed in an optical path of the first split light or an optical path of the second split light and configured to collect incident light, wherein the first light collecting lens is configured that an optical diameter of the incident light is smaller than an optical diameter of non-incident light at the light receiver.

Abstract: A control device for a rotating electric machine includes: a reference current command generation unit which generates d-axis and q-axis reference current command values on the basis of a torque command value and a rotation speed; a current phase generation unit which generates a current phase command on the basis of the d-axis and q-axis reference current command values, the torque command value, the rotation speed, and a power supply voltage; a current command generation unit which generates d-axis and q-axis current command values on the basis of the d-axis and q-axis reference current command values and the current phase command; and a voltage command generation unit which generates three-phase voltage command values on the basis of the d-axis and q-axis current command values, the rotation speed, a rotational position, and three-phase currents, and outputs the three-phase voltage command values to an inverter.

Abstract: To provide a controller for rotary electric machine and an electric power steering apparatus which can increases decreases an increase amount of the current of d-axis in the negative direction appropriately, and can perform the weakening magnetic flux appropriately, irrespective of increase and decrease in the rotational angle speed, without using the information on the inductance and the interlinkage flux of the rotor. A controller for rotary electric machine, in a case where the current command value of q-axis is a positive value, changes the current command value of d-axis, based on a deviation between an offset q-axis current command value obtained by subtracting the q-axis offset value of the positive value from the current command value of q-axis, and the current detection value of q-axis.

Abstract: To provide a controller for rotary electric machine which can suppress the increase in the switching frequency by the voltage for estimation while reducing the estimation delay of the magnetic pole position (the rotational angle). A controller for rotary electric machine turns on and off switching devices which the inverter has and applies voltage to the winding, based on a comparison result between the voltage command and the carrier wave; generates the voltage command for estimation of a preliminarily set one period on a stationary coordinate system fixed to the winding; generates the carrier wave of the same one period as the one period of the voltage command for estimation; extracts the frequency component of the one period of the voltage command for estimation from the current detection value; and estimates a rotational angle based on the frequency component.

Abstract: In order to provide an information processing apparatus capable of obtaining a variation amount in an optical characteristic of an optical system provided in an exposure apparatus in consideration of a control for suppressing a temperature variation of the optical system, the information processing apparatus according to the present invention is configured to predict the variation amount in the optical characteristic of the optical system by inputting a target temperature of the optical system to a learning model, in which the learning model is a learning model obtained by machine learning.

Abstract: A laser interferometer includes an optical interference unit as a non-coaxial optical system including a laser source for emitting a laser beam, a light modulator for modulating a frequency of the laser beam to generate reference light, a light receiving element for receiving object light generated in response to irradiation of an object with the laser beam, and the reference light to output a received light signal, a first aperture element disposed on a light path entering the light receiving element, and for detecting a positional deviation of an optical axis of the object light from an optical axis of the reference light, and an angular deviation detection unit for detecting an angular deviation of the optical axis of the object light from the optical axis of the reference light based on the received light signal, and an instruction unit for issuing an instruction to change a relative arrangement between the optical interference unit and the object based on a detection result of the positional deviation an

Abstract: To provide an automatic driving support apparatus which can continue the automatic steering, when the abnormality of the control system of the motor for steering is detected. An automatic driving support apparatus including: an automatic steering control unit that calculates a steering angle command value of a steering apparatus of the ego vehicle based on the detected traveling state and the detected peripheral state; a motor for steering; a motor drive circuit; a steering angle control unit that calculates a motor output command value based on a steering angle command value and a steering angle detection value; a motor control unit that generates driving signals of the motor drive circuit based on the motor output command value; and an abnormality detection unit, wherein the motor control unit generates driving signals at abnormal time according to a content of abnormality related to the motor for steering.

Abstract: A synchronous machine drive control device such that a rotation angle correction amount can be detected even when a synchronous machine is rotating at high speed, and the rotation angle correction amount can be detected over a wide range, is obtained. A rotation angle correction amount calculation unit that calculates a correction amount of a rotation angle of a synchronous machine is included in an inverter control device, and the correction amount of the rotation angle is calculated based on a current detected by a current sensor by a three-phase short circuit being implemented in a state wherein the synchronous machine is rotating.

Abstract: The purpose is to smooth a surface of a molten portion, to suppress formation of a sharp edge and an undercut at an end of the molten portion and in the vicinity of the end. A laser welding method includes emitting a laser beam onto a surface of a stack of a plurality of workpieces, and moving the laser beam in a predetermined traveling direction, thereby welding the plurality of workpieces to each other. The laser beam includes a main beam, a sub beam, a rear beam, and an end beam. The main beam is emitted onto a main region. The sub beam is emitted onto a sub region surrounding the main region. The rear beam is emitted onto a rear region located rearward of the main region. The end beam is emitted onto an end region located rearward of the rear region and outside of the sub region.

Abstract: Provided is a laser interferometer including: a laser light source configured to emit laser light; an optical modulator including a vibrator that has a light reflection surface and vibrates in response to a drive signal, the optical modulator being configured to overlap a modulation signal on the laser light by reflecting the laser light on the light reflection surface; and a photodetector configured to receive the laser light including a sample signal derived from an object and the modulation signal, and to output a light-receiving signal. When an inclination angle ?qom is defined by a normal line of the light reflection surface and an incident optical axis of the laser light incident on the light reflection surface, the following Relationship (1) is satisfied. 0[deg]<?qom<5.

Abstract: A substrate processing system includes a substrate processing apparatus, an input/output apparatus, a first control apparatus installed with first software, configured to control the substrate processing apparatus based on a first signal output from the input/output apparatus, and configured to acquire a second signal output from the substrate processing apparatus, a second control apparatus installed with second software, and configured to perform same calculation processing as that of the first control apparatus, and not configured to control the substrate processing apparatus, a first distributor configured to distribute the first signal to the second control apparatus, and a second distributor configured to distribute the second signal to the second control apparatus. The second control apparatus outputs a third signal based on the first signal and the second signal.

Abstract: To provide a controller for rotary electric machine and an electric power steering apparatus which can set a control gain which is used for controlling the d-axis current command value based on the q-axis current deviation between the current command value of q-axis and the current detection value of q-axis, considering the response of the current of q-axis. A controller for rotary electric machine changes the current command value of d-axis, based on a value obtained by multiplying a proportional gain to a q-axis current deviation which is a deviation between the current command value of q-axis and the current detection value of q-axis; and changes the proportional gain in inverse proportion to the rotational angle speed.

Abstract: A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and an optical path length variable section that changes an optical path length of an optical path through which the third laser light propagates.

Abstract: To provide a controller for rotary electric machine and an electric power steering apparatus which can increases decreases an increase amount of the current of d-axis in the negative direction appropriately, and can perform the weakening magnetic flux appropriately, irrespective of increase and decrease in the rotational angle speed, without using the information on the inductance and the interlinkage flux of the rotor. A controller for rotary electric machine, in a case where the current command value of q-axis is a positive value, changes the current command value of d-axis, based on a deviation between an offset q-axis current command value obtained by subtracting the q-axis offset value of the positive value from the current command value of q-axis, and the current detection value of q-axis.

Abstract: A metal member includes a first plate, and a second plate abutting against and welded to the first plate in at least one butt portion. In the butt portion, a length from a first end to a second end of a welding boundary line between the first plate and the second plate is longer than a length of a straight line connecting the first end to the second end of the welding boundary line.

Abstract: There is provided a laser interferometer. The laser interferometer includes a laser light source; a first light splitter configured to split the laser light into first split light and second split light; an optical modulator configured to modulate the first split light into reference light from the first split light; a second light splitter configured to split the reference light and object light generated by an object to be measured reflecting the second split light into third split light and fourth split light; a first light receiving element configured to receive the third split light; and a second light receiving element configured to receive the fourth split light. An optical axis of the first split light that travels from the first light splitter toward the optical modulator is shifted from an optical axis of the reference light that travels from the optical modulator toward the first light splitter.

Abstract: To provide a motor controller which can suppress occurrence of a torque difference between systems, even if a DC voltage difference occurs between systems, in the case where each system is provided with a DC power source. A motor controller is provided with a first controller that controls so that the first q-axis current detection value approaches the second q-axis current detection value or the second q-axis current command value obtained from the second controller, when determining that the first DC voltage is higher than the second DC voltage; and a second controller that controls so that the second q-axis current detection value approaches the first q-axis current detection value or the first q-axis current command value obtained from the first controller, when determining that the second DC voltage is higher than the first DC voltage.