Abstract: A mass spectrometer includes: a plasma generation device for generating plasma for ionizing an introduced sample; an interface device for drawing the plasma into vacuum; an ion lens device for extracting and inducing ions as an ion beam from the plasma; a collision/reaction cell for removing an interference ion from the ion beam; a mass analyzer or filter for allowing a predetermined ion in the ion beam from the collision/reaction cell to pass along a first axis based on a mass-to-charge ratio; an ion detector for detecting the ion; an ion deflection device before the mass analyzer, and also an ion deflection device between the mass analyzer and the ion detector. The mass spectrometer reduces background noises in a mass analyzer by removing neutral particles from the ion beam without reducing the measurement sensitivity on ions to be analyzed as much as possible.

Abstract: A mass spectrometer includes: a plasma generation device for generating plasma for ionizing an introduced sample; an interface device for drawing the plasma into vacuum; an ion lens device for extracting and inducing ions as an ion beam from the plasma; a collision/reaction cell for removing an interference ion from the ion beam; a mass analyzer or filter for allowing a predetermined ion in the ion beam from the collision/reaction cell to pass along a first axis based on a mass-to-charge ratio; an ion detector for detecting the ion; an ion deflection device before the mass analyzer, and also an ion deflection device between the mass analyzer and the ion detector. The mass spectrometer reduces background noises in a mass analyzer by removing neutral particles from the ion beam without reducing the measurement sensitivity on ions to be analyzed as much as possible.

Abstract: An inductively coupled plasma MS/MS mass analyzer (ICP-MS/MS) may include a first vacuum chamber which draws plasma containing an ionized sample into vacuum, a second vacuum chamber which includes a device or means which extracts and guides ions as an ion beam from the ions output from the first vacuum chamber, a third vacuum chamber which has a first ion optical separation device or means, a fourth vacuum chamber which has a cell into which reaction gas is introduced, and a fifth vacuum chamber which has a second optical separation device or means and a detector, wherein the second vacuum chamber and third vacuum chamber are individually evacuated.

Abstract: A mass spectrometer includes first to fifth vacuum chambers and a single split-flow turbo molecular pump. The first vacuum chamber draws an ionized sample from atmospheric pressure plasma. The second vacuum chamber includes means for extracting and guiding an ion beam from ions from the first vacuum chamber. The third vacuum chamber includes first ion-optical separator means. The fourth vacuum includes a collision/reaction cell into which collision/reaction gas is introduced. The fifth vacuum chamber includes second ion-optical separator means and a detector. The split-flow turbo molecular pump has multiple inlets for differentially evacuating the second, third, fourth and fifth vacuum chambers. The fourth vacuum chamber is connected to an inlet of the split-flow turbo molecular pump providing a pressure higher than a pressure of an inlet of the split-flow turbo molecular pump to which the third vacuum chamber is connected.

Abstract: An inductively-coupled plasma torch capable of holding a capillary tube coaxially with an injector tube and conveying make-up gas smoothly is provided. The inductively-coupled plasma torch of the present invention includes a guide which is held near the end portion of the injector tube, and has a through hole for holding the capillary tube coaxially with the injector tube, and means for conveying make-up gas.

Abstract: An inductively-coupled plasma torch capable of holding a capillary tube coaxially with an injector tube and conveying make-up gas smoothly is provided. The inductively-coupled plasma torch of the present invention includes a guide which is held near the end portion of the injector tube, and has a through hole for holding the capillary tube coaxially with the injector tube, and means for conveying make-up gas.