Abstract: Methods of and systems for reforming films comprising silicon nitride are disclosed. Exemplary methods include providing a substrate within a reaction chamber, forming activated species by irradiating a reforming gas with microwave radiation, and exposing substrate to the activated species. A pressure within the reaction chamber during the step of forming activated species can be less than 50 Pa.

Abstract: A sensor unit includes: a sensor that is attached to a measurement target object becoming deformed in response to a swing taken with the measurement target object and that generates an output signal indicating a relationship between a physical quantity related to an amount of deformation of the measurement target object and a time; a feature value generation circuit that generates a feature value, the feature value being a parameter indicating a feature of the swing, on the basis of the output signal obtained by the sensor; and a communication unit that is attached to the measurement target object and that transmits the feature value to an external device by wireless communication or wired communication.

Abstract: A data processing apparatus includes an arithmetic circuit that performs an acquiring step of acquiring swing data indicating relationship between a physical quantity concerning an amount of deformation of an object to be measured and time, a determining step of determining whether the swing data indicates the physical quantity concerning the amount of deformation of the object to be measured, which occurs when the object to be measured is swung, to determine whether the swing data is to be deleted, and a deleting step of deleting the swing data if it is determined that the swing data does not indicate the physical quantity concerning the amount of deformation of the object to be measured, which occurs when the object to be measured is swung.

Abstract: Provided is a sensor unit including a first sensor portion that detects deformation of a measuring target object and a second sensor portion that detects deformation of the measuring target object, in which in a state in which the first sensor portion and the second sensor portion are attached to the measuring target object, the first sensor portion and the second sensor portion are fixed to the measuring target object such that the measuring target object is disposed between the first sensor portion and the second sensor portion in a first direction, and a physical property value of the first sensor portion and a physical property value of the second sensor portion are changed according to first deformation of the measuring target object.

Abstract: [Object] Provided are a “eutectic colloidal crystal” which is an aggregate of plural kinds of colloidal crystals having different lattice constants, a solidified body of the eutectic colloidal crystal, and methods for producing them. [Resolution means] The eutectic colloidal crystal of the present invention contains two or more kinds of colloidal crystals composed of substantially monodispersed colloidal particles having different particle sizes. This eutectic colloidal crystal is obtained by providing a colloidal dispersion of two or more kinds of colloidal particles having different particle sizes, and a polymer which will not substantially adsorb to the colloidal particles (the coefficient of variation in particle size of these colloidal particles is less than 20%) dissolved in a dispersion medium (dispersion preparation process), and allowing the colloidal dispersion to stand (eutectoid process).

Abstract: [Object] Provided are a “eutectic colloidal crystal” which is an aggregate of plural kinds of colloidal crystals having different lattice constants, a solidified body of the eutectic colloidal crystal, and methods for producing them. [Resolution means] The eutectic colloidal crystal of the present invention contains two or more kinds of colloidal crystals composed of substantially monodispersed colloidal particles having different particle sizes. This eutectic colloidal crystal is obtained by providing a colloidal dispersion of two or more kinds of colloidal particles having different particle sizes, and a polymer which will not substantially adsorb to the colloidal particles (the coefficient of variation in particle size of these colloidal particles is less than 20%) dissolved in a dispersion medium (dispersion preparation process), and allowing the colloidal dispersion to stand (eutectoid process).