Abstract: Disclosed are methods and apparatus for simultaneously flooding a sample (e.g., a semiconductor wafer) to control charge and inspecting the sample. The apparatus includes a charged particle beam generator arranged to generate a charged particle beam substantially towards a first portion of the sample and a flood gun for generating a second beam towards a second portion of the sample. The second beam is generated substantially simultaneously with the inspection beam. The apparatus further includes a detector arranged to detect charged particles originating from the sample portion. In a further implementation, the apparatus further includes an image generator for generating an image of the first portion of the sample from the detected particles. In one embodiment, the sample is a semiconductor wafer. In a method aspect, a first area of a sample is flooded with a flood beam to control charge on a surface of the sample. A second area of the sample is inspected with an inspection beam.

Abstract: An apparatus for drying/calcining comprises a horizontally extending rotatable drum and a center tube, concentrically positioned within the rotatable drum to provide an annular combustion chamber between the outer wall of the center tube and the inner wall of the rotatable drum. One or more gas jet burners are positioned to inject gas fuel and combustion air into the annular combustion chamber in a tangential direction to create a vortex flow of combustion gases through the annular combustion chamber. The flue gas is discharged through the center tube. In operation, a material to be dried and/or calcined is applied to the external wall of the rotatable drum as it rotates toward a scraper or doctor blade where the dried or calcined product is removed by scraping.