Patents by Inventor Jun-Rung Bai

Jun-Rung Bai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for sensing and controlling tipping movement of a semiconductor boat
    Patent number: 6244422
    Abstract: A guard fence is mounted on a transfer arm used to transport a boat carrying semiconductor wafers. The fence limits tipping movement of the boat and includes a plurality of sensors to sense tipping movement of both the top and bottom of the boat, in opposite tipping directions. A guard cover includes sensors that sense when the boat is tipped off-axis before the boat is moved into a process chamber by a boat elevator. Each of the sensors delivers signals to a controller which controls the operation of the transfer and elevator and interrupts operation thereof when the boat has tipped off-axis.
    Type: Grant
    Filed: March 31, 1999
    Date of Patent: June 12, 2001
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jun-Rung Bai