Abstract: An access port for a house vacuum system that is equipped with a removable trap is described. The access port can be constructed by the components of a port body of elongated, cylindrical shape, which may have either an annular cross-section or a rectangular cross-section; a port cover that is pivotally connected to a floor panel by a hinge; a debris trap of elongated, cylindrical shape that is removable mounted inside the port body; a vacuum hose access port that is provided in the port cover; and a cover for the vacuum hose access port pivotally connected to the port cover by a hinge. The access port may also be made into a portable unit that can be moved from vacuum port to vacuum port in a cleanroom environment.

Abstract: An access port for a house vacuum system that is equipped with a removable trap is described. The access port can be constructed by the components of a port body of elongated, cylindrical shape, which may have either an annular cross-section or a rectangular cross-section; a port cover that is pivotally connected to a floor panel by a hinge; a debris trap of elongated, cylindrical shape that is removable mounted inside the port body; a vacuum hose access port that is provided in the port cover; and a cover for the vacuum hose access port pivotally connected to the port cover by a hinge. The access port may also be made into a portable unit that can be moved from vacuum port to vacuum port in a cleanroom environment.

Abstract: A non-vacuum semiconductor pick-up and transfer apparatus for handling semiconductor wafers. A flat tapered blade, with front and rear arcuate abutment surfaces adapted to hold a wafer, is provided. In use the blade is thrust between spaced wafers supported in a holder, lifted to retain the wafer between the abutment surfaces, and removed from the holder. The thin and tapered blade shape minimizes damage to the associated wafers in the event of a misalignment of the blade with the wafers.