Abstract: A cryopump includes a cryopump container that defines a cryopump intake port, includes a container bottom portion, and extends from the cryopump intake port toward the container bottom portion in an axial direction, a cryocooler that is installed in the cryopump container and includes a first cooling stage and a second cooling stage that is cooled to a temperature lower than a temperature of the first cooling stage, a radiation shield that is thermally coupled to the first cooling stage and extends from the cryopump intake port into the cryopump container in the axial direction such that a shield outer-side gap is formed between the cryopump container and the radiation shield, and a plurality of cryopanels that are thermally coupled to the second cooling stage and are arranged in an inner space of the radiation shield in the axial direction.

Abstract: A cryopump includes a cryopump container that defines a cryopump intake port, a cryocooler that is installed in the cryopump container and includes a first cooling stage and a second cooling stage that is cooled to a temperature lower than a temperature of the first cooling stage, a radiation shield that is thermally coupled to the first cooling stage and extends in an axial direction from the cryopump intake port into the cryopump container, and a plurality of cryopanels that are thermally coupled to the second cooling stage and are arranged in the axial direction inside the radiation shield, in which the plurality of cryopanels include a top cryopanel closest to the cryopump intake port in the axial direction, and at least one cryopanel disposed with a space from the top cryopanel in the axial direction, and the top cryopanel includes an opening.

Abstract: A cryopump includes: a cryopump container defining a cryopump intake port; a cryocooler including a first cooling stage and a second cooling stage; a radiation shield thermally coupled to the first cooling stage and extending from the cryopump intake port into the cryopump container; an intake port plate thermally coupled to the first cooling stage and extending along a plane perpendicular to an axial direction, a gas inlet being formed between the intake port plate and the radiation shield; a cryopanel unit thermally coupled to the second cooling stage and disposed inside the radiation shield, a frost accommodation space being formed between the cryopanel unit and the intake port plate; and a skirt thermally coupled to the first cooling stage and extending from an outer periphery of the intake port plate into the radiation shield, a gas flow path being formed between the skirt and the radiation shield.

Abstract: A substrate processing apparatus includes a liquid processing unit configured to supply, onto a front surface of a substrate, individual multiple processing liquids different from each other; an exhaust unit configured to exhaust an exhaust gas exhausted from the liquid processing unit to an outside. The exhaust unit includes a main exhaust pipe including a first portion and a second portion, a first individual exhaust pipe, a second individual exhaust pipe, a switching unit and an outside air introduction pipe. The switching unit includes a first switching mechanism, a second switching mechanism, a third switching mechanism provided between the first portion and the second portion of the main exhaust pipe, an outside air introduction pipe connected to the second portion to allow outside air to be introduced into the second portion, and a fourth switching mechanism provided in the outside air introduction pipe.

Abstract: A substrate processing apparatus includes a liquid processing unit configured to supply, onto a front surface of a substrate, individual multiple processing liquids different from each other; an exhaust unit configured to exhaust an exhaust gas exhausted from the liquid processing unit to an outside. The exhaust unit includes a main exhaust pipe including a first portion and a second portion, a first individual exhaust pipe, a second individual exhaust pipe, a switching unit and an outside air introduction pipe. The switching unit includes a first switching mechanism, a second switching mechanism, a third switching mechanism provided between the first portion and the second portion of the main exhaust pipe, an outside air introduction pipe connected to the second portion to allow outside air to be introduced into the second portion, and a fourth switching mechanism provided in the outside air introduction pipe.

Abstract: An optical coupling module for suppressing optical loss by improving degradation of a wiggle characteristic exhibited upon application of an external force. A sleeve joins end faces of optical fibers. A sleeve casing covers the sleeve to protect the joined surfaces of the optical fibers. A splitting slit portion having a return structure is formed in a side of the sleeve. The sleeve casing comprises an inner sleeve casing for covering the sleeve, and an outer sleeve casing for covering the inner sleeve casing. The inner sleeve casing has a side formed with slits. The outer sleeve casing has an inner surface formed with guards for holding the sleeve. The outer sleeve casing is slidingly mounted by inserting the guards into the slits.

Abstract: An optical coupling module attaches and detaches an optical fiber with respect to a device that carries out optical communication. The optical coupling module includes a sleeve that includes and couples the optical fiber, a sleeve case that covers the sleeve, and a guiding unit that guides, an optical connector that is inserted from outside, such that an optical fiber, exposed at the tip of the optical connector, penetrates inside the sleeve. The guiding unit includes elastic members that are deformed due to the optical connector being inserted and fix the optical connector.

Abstract: An optical coupling module for suppressing optical loss by improving degradation of a wiggle characteristic exhibited upon application of an external force. A sleeve joins end faces of optical fibers. A sleeve casing covers the sleeve to protect the joined surfaces of the optical fibers. A splitting slit portion having a return structure is formed in a side of the sleeve. The sleeve casing comprises an inner sleeve casing for covering the sleeve, and an outer sleeve casing for covering the inner sleeve casing. The inner sleeve casing has a side formed with slits. The outer sleeve casing has an inner surface formed with guards for holding the sleeve. The outer sleeve casing is slidingly mounted by inserting the guards into the slits.