Abstract: A gas supply system includes a first device to a third device. A plurality of integral units of the first device is configured to select one or more gases from one or more gas sources and supply the selected gases. The second device is configured to distribute plural gases from the integral units and supply the distributed gases while controlling flow rates of the distributed gases. The third device is configured to exhaust the gases within the gas supply system to a gas exhaust device.

Abstract: In a method of an embodiment, a pressure sensor is selected from first and second pressure sensors according to a set flow rate. A measurable maximum pressure of the second pressure sensor is higher than a measurable maximum pressure of first pressure sensor. The target pressure of a chamber is determined according to the set flow rate. Until the pressure of the chamber reaches the target pressure after gas is started to be output from the flow rate controller to the chamber at an output flow rate according to the set flow rate and a pressure controller provided between the chamber and an exhaust apparatus is closed, the pressure of the chamber is measured by the selected pressure sensor. The output flow rate of the flow rate controller is determined from a rate of rise of the pressure of the chamber.

Abstract: In a method of an embodiment, a pressure sensor is selected from first and second pressure sensors according to a set flow rate. A measurable maximum pressure of the second pressure sensor is higher than a measurable maximum pressure of first pressure sensor. The target pressure of a chamber is determined according to the set flow rate. Until the pressure of the chamber reaches the target pressure after gas is started to be output from the flow rate controller to the chamber at an output flow rate according to the set flow rate and a pressure controller provided between the chamber and an exhaust apparatus is closed, the pressure of the chamber is measured by the selected pressure sensor. The output flow rate of the flow rate controller is determined from a rate of rise of the pressure of the chamber.

Abstract: A gas supply system includes a first device to a third device. A plurality of integral units of the first device is configured to select one or more gases from one or more gas sources and supply the selected gases. The second device is configured to distribute plural gases from the integral units and supply the distributed gases while controlling flow rates of the distributed gases. The third device is configured to exhaust the gases within the gas supply system to a gas exhaust device.

Abstract: A diaphragm valve comprises a body with an inflow passage and an outflow passage for fluid, a valve seat disposed around said inflow passage, and a diaphragm which are disposed on said valve seat and opens and closes between said inflow passage and said outflow passage, and a gas flow hole which connects said inflow passage to said outflow passage is disposed in said valve seat.

Abstract: The invention has its object to provide a diaphragm type high pressure shut-off valve which is simple in external shape, can realize miniaturization and is convenient in handling.The shut-off valve comprises a cylindrical housing (10) having a supply unit for compressed air at its end in an axial direction (Q), a piston (19) provided in the housing (10) and adapted to reciprocate in response to the compressed air, a return spring (20) provided in the housing (10) so as to permit the piston (19) to return, a rack portion (19A) provided to extend from the piston (19), a cam pinion (17) having a pinion portion (17B) provided integrally with the pinion portion (17B) and a rotating shaft (18) supported by the housing (10), and a diaphragm (7) adapted for movement in response to displacements of stems (9,13) and abutting against the cam face portion (17A) of the cam pinion (17).

Abstract: A diaphragm valve structure which is durable and has high reliability is obtained.In the diaphragm valve structure, a body 11, a valve seat 12, a seat holder 13, and a diaphragm 14, are provided; an inflow passage and an outflow passage for fluids and openings thereof are formed in body 11, valve seat 12 is disposed around the periphery of the opening of the inflow passage, the valve seat is pressed downward into body 11 by seat holder 13, diaphragm 14 comes into contact with valve seat 12 and places the opening in an airtight state, and thereby, movement of fluid between the inflow passage and the outflow passage is halted. At least two projecting parts are formed between the inflow passage and the outflow passage of this diaphragm valve structure; one of these two projecting parts is formed on valve seat 12, and the other projecting part is formed either on valve seat 12 or on seat holder 13.