Abstract: The present inventive concept relates to a substrate processing apparatus comprising: a chamber; a substrate support part which supports at least one substrate in the chamber; a lower plate which is disposed above the substrate support part; and an upper plate which is disposed above the lower plate, wherein: the upper plate includes a first spray hole which provides a first gas and a second spray hole which provides a second gas; and the lower plate includes a first opening which is disposed under the first spray hole so as to allow the first gas provided from the first spray hole to pass therethrough and a second opening which is disposed under the second spray hole so as to allow the second gas provided from the second spray hole to pass therethrough.

Abstract: The present invention relates to a ruthenium precursor compound, and more particularly, to a ruthenium precursor compound which is for providing ruthenium to an ammonia decomposition reaction catalyst and is represented by Formula CxHyOzNmRun, wherein x is an integer of 3 to 20, y is an integer of 0 to 32, z is an integer of 0 to 20, m is an integer of 0 to 10, and n is an integer of 1 to 3. In addition, the present invention relates to an ammonia reaction catalyst using the ruthenium precursor, and to a method for preparing the ammonia reaction catalyst, and provides an ammonia reaction catalyst having an excellent ammonia conversion rate at low temperatures, thereby being capable of efficient hydrogen production.

Abstract: The present invention relates to a hydrogen production reactor comprising a high-efficiency composite having a high thermal conductivity and an antioxidant property. Specifically, the hydrogen production reactor comprises: a first region in which a combustion reaction of fuel occurs; a second region in which a hydrogen extraction reaction occurs; a metal substrate that partitions the first region and the second region; and a coating layer that comprises boron nitride (BN) and is formed on at least one surface of the metal substrate, wherein heat generated in the first region is transferred to the second region through the metal substrate.

Abstract: The present invention relates to a catalyst in which a catalytic metal is supported on a support including a single-crystalline hexagonal material, and a preparation method therefor, wherein the catalyst can be effectively used in ammonia dehydrogenation or ammonia synthesis.