Patents by Inventor Juncheng Yang

Juncheng Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing apparatus having scraping fixture
    Patent number: 11396080
    Abstract: Embodiments of apparatus and method for chemical mechanical polishing (CMP) are disclosed. In an example, an apparatus for CMP includes a platen, a slurry supply, and at least one scraping fixture. The platen is configured to rotate a pad thereon about a central axis of the pad. The slurry supply is configured to supply a slurry onto the pad while the pad rotates. The at least one scraping fixture is configured to scrape the slurry off the pad when the slurry travels a distance between the slurry supply and the at least one scraping fixture in a circumferential direction of the pad as the pad rotates.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: July 26, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Lin Gao, Yangbo Jiang, Guangyi Wang, Juncheng Yang
  • CHEMICAL MECHANICAL POLISHING APPARATUS HAVING SCRAPING FIXTURE
    Publication number: 20200130132
    Abstract: Embodiments of apparatus and method for chemical mechanical polishing (CMP) are disclosed. In an example, an apparatus for CMP includes a platen, a slurry supply, and at least one scraping fixture. The platen is configured to rotate a pad thereon about a central axis of the pad. The slurry supply is configured to supply a slurry onto the pad while the pad rotates. The at least one scraping fixture is configured to scrape the slurry off the pad when the slurry travels a distance between the slurry supply and the at least one scraping fixture in a circumferential direction of the pad as the pad rotates.
    Type: Application
    Filed: December 12, 2018
    Publication date: April 30, 2020
    Inventors: Lin Gao, Yangbo Jiang, Guangyi Wang, Juncheng Yang