Abstract: Provided is a Nd-based two-phase separation amorphous alloy by adding an element having a big difference in heat of mixing in a Nd-based alloy with a superior amorphous formability through an inherent characteristic of compositional elements and consideration of thermodynamics, at the time of forming amorphous phase, to thereby enable two-phase separation amorphous alloy during solidification.

Abstract: The present invention relates to a sputtering target of a multi-component single body, a preparation method thereof, and a method for fabricating a multi-component alloy-based nanostructured thin film using the same. The sputtering target according to the present invention comprises an amorphous or partially crystallized glass-forming alloy system composed of a nitride forming metal element, which is capable of reacting with nitrogen to form a nitride, and a non-nitride forming element which has no or low solid solubility in the nitride forming metal element and does not react with nitrogen or has low reactivity with nitrogen, wherein the nitrogen forming metal element comprises at least one element selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Y, Mo, W, Al, and Si, and the non-nitride forming element comprises at least one element selected from Mg, Ca, Sc, Ni, Cu, Ag, In, Sn, La, Au, and Pb.

Abstract: The present invention relates to a sputtering target of a multi-component single body, a preparation method thereof, and a method for fabricating a multi-component alloy-based nanostructured thin film using the same. The sputtering target according to the present invention comprises an amorphous or partially crystallized glass-forming alloy system composed of a nitride forming metal element, which is capable of reacting with nitrogen to form a nitride, and a non-nitride forming element which has no or low solid solubility in the nitride forming metal element and does not react with nitrogen or has low reactivity with nitrogen, wherein the nitrogen forming metal element comprises at least one element selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Y, Mo, W, Al, and Si, and the non-nitride forming element comprises at least one element selected from Mg, Ca, Sc, Ni, Cu, Ag, In, Sn, La, Au, and Pb.

Abstract: Disclosed is an atmospheric pressure plasma apparatus for enhancing and or controlling the dissociation of a secondary gas by converting a source gas into a plasma state at atmospheric pressure and controlling the interaction between that plasma and the secondary gas using porous metal, and ceramic tubes to create a path having controllable isolation from the region where plasma is generated.

Abstract: Disclosed is an atmospheric pressure plasma apparatus for enhancing and or controlling the dissociation of a secondary gas by converting a source gas into a plasma state at atmospheric pressure and controlling the interaction between that plasma and the secondary gas using porous metal, and ceramic tubes to create a path having controllable isolation from the region where plasma is generated.

Abstract: Provided is a Nd-based two-phase separation amorphous alloy by adding an element having a big difference in heat of mixing in a Nd-based alloy with a superior amorphous formability through an inherent characteristic of compositional elements and consideration of thermodynamics, at the time of forming amorphous phase, to thereby enable two-phase separation amorphous alloy during solidification.

Abstract: Provided is a Nd-based two-phase separation amorphous alloy by adding an element having a big difference in heat of mixing in a Nd-based alloy with a superior amorphous formability through an inherent characteristic of compositional elements and consideration of thermodynamics, at the time of forming amorphous phase, to thereby enable two-phase separation amorphous alloy during solidification.