Patents by Inventor Jung-Hun Yeon

Jung-Hun Yeon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus, method of controlling the same, and alignment method for exposure
    Patent number: 9437818
    Abstract: An exposure apparatus capable of preventing a reduction in its accuracy due to, for example, the influence of aging or the influence of heat is disclosed. Also disclosed is a method of controlling the same, and an alignment method for exposure. In one aspect, the exposure apparatus includes a main stage for adjusting a position of a substrate, a beam irradiation unit for irradiating a beam onto a mask, and a beam monitoring unit having a position fixed with respect to the main stage, and for recognizing the beam emitted from the beam irradiation unit and passed through one pattern of the mask.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: September 6, 2016
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jin-Hong Jeun, Seok-Joo Lee, Jung-Hun Yeon
  • EXPOSURE APPARATUS, METHOD OF CONTROLLING THE SAME, AND ALIGNMENT METHOD FOR EXPOSURE
    Publication number: 20140168624
    Abstract: An exposure apparatus capable of preventing a reduction in its accuracy due to, for example, the influence of aging or the influence of heat is disclosed. Also disclosed is a method of controlling the same, and an alignment method for exposure. In one aspect, the exposure apparatus includes a main stage for adjusting a position of a substrate, a beam irradiation unit for irradiating a beam onto a mask, and a beam monitoring unit having a position fixed with respect to the main stage, and for recognizing the beam emitted from the beam irradiation unit and passed through one pattern of the mask.
    Type: Application
    Filed: May 31, 2013
    Publication date: June 19, 2014
    Inventors: Jin-Hong Jeun, Seok-Joo Lee, Jung-Hun Yeon