Abstract: A substrate processing apparatus includes: a conveyor belt configured to have an outer surface on which a bottom surface of a substrate is seated; and a polishing head unit configured to face an upper surface of the substrate, wherein the polishing head unit includes: a polishing head connected to a driver; a polishing pad configured to face the polishing head; a polishing pad fixing ring disposed between the polishing head and the polishing pad; and a temperature sensor configured to overlap the polishing pad fixing ring and to be spaced apart from the polishing pad fixing ring.

Abstract: Provided is an injection molding apparatus for a worm wheel, in which the worm wheel is not only integrally manufactured by an injection mold method, but a gear teeth structure of a gear forming unit is also manufactured as an injection mold without a hobbing operation, and the structure of the injection molding apparatus is also improved so that worm wheel products can be easily taken out from the injection mold. The injection molding apparatus includes: a boss injection mold; a product injection mold having a movable side core, a fixed side core, and a worm gear tooth-shaped core; and a take-out unit for taking out a worm wheel product formed with a worm gear by the product injection mold, wherein the take-out unit includes: a plurality of take-out pins; a take-out plate; and a guide unit guiding rotation of the worm gear tooth-shaped core.

Abstract: Provided is a central cooling system including: a ventilation fan unit configured to provide air to a predetermined space; a chiller unit configured to provide heat exchange medium to lower temperature of the air; a cooling tower unit configured to provide a coolant to the chiller unit to lower temperature of the heat exchange medium, and configured to lower temperature of the coolant through heat exchange between the coolant and ambient air; a sensor unit configured to measure the temperatures of the air, the heat exchange medium, and the coolant, and temperature and humidity of the ambient air; and a control unit configured to monitor energy consumption of the central cooling system and configured to calculate at least one of a control temperature of the heat exchange medium, a control temperature of the coolant, and a control temperature of the air which minimizes the energy consumption.

Abstract: Provided is an injection molding apparatus for a worm wheel, in which the worm wheel is not only integrally manufactured by an injection mold method, but a gear teeth structure of a gear forming unit is also manufactured as an injection mold without a hobbing operation, and the structure of the injection molding apparatus is also improved so that worm wheel products can be easily taken out from the injection mold. The injection molding apparatus includes: a boss injection mold; a product injection mold having a movable side core, a fixed side core, and a worm gear tooth-shaped core; and a take-out unit for taking out a worm wheel product formed with a worm gear by the product injection mold, wherein the take-out unit includes: a plurality of take-out pins; a take-out plate; and a guide unit guiding rotation of the worm gear tooth-shaped core.

Abstract: Provided is a central cooling system including: a ventilation fan unit configured to provide air to a predetermined space; a chiller unit configured to provide heat exchange medium to lower temperature of the air; a cooling tower unit configured to provide a coolant to the chiller unit to lower temperature of the heat exchange medium, and configured to lower temperature of the coolant through heat exchange between the coolant and ambient air; a sensor unit configured to measure the temperatures of the air, the heat exchange medium, and the coolant, and temperature and humidity of the ambient air; and a control unit configured to monitor energy consumption of the central cooling system and configured to calculate at least one of a control temperature of the heat exchange medium, a control temperature of the coolant, and a control temperature of the air which minimizes the energy consumption.

Abstract: A noise reduction system and a noise reduction method are provided. The noise reduction method estimates directions of arrival of signals by directly using a signal subspace of the signals. Noise of the signals is suppressed at directions other than the directions of arrival. In one embodiment, the signals include audio signals. The signals may be multiple wide-band signals and/or coherent signals in multipath environment with a low signal-to-noise ratio.