Abstract: A substrate voltage generation circuit for a semiconductor device which is capable of decreasing the amount of current consumed by a charge pump. The circuit includes a burn-in detection unit for differently varying logical states of output signals .phi. in a normal mode and a burn-in mode, respectively, a mode judgement unit for outputting first and second voltages in the normal mode and the burn-in mode in accordance with an output signal from the burn-in detection unit, an oscillation unit for outputting voltages OSCV having different oscillation frequencies in accordance with the first and second voltages, and a charge pump for pumping an output voltage OSCV from the oscillation unit and generating a substrate voltage.