Patents by Inventor Jung-woo Sun

Jung-woo Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Oxide film thickness standards and manufacturing methods thereof
    Patent number: 6231918
    Abstract: A film thickness standard (FTS) comprises an oxide film formed on a semiconductor substrate with a thickness over 1 &mgr;m. A method of preparing an oxide film thickness standard reference of semiconductor device is carried out by repeatedly and continuously performing the formation process of the oxide film under the same processing conditions thereby to form the oxide film on a semiconductor substrate with a thickness over a certain level.
    Type: Grant
    Filed: September 30, 1999
    Date of Patent: May 15, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jung-woo Sun, Sang-kil Lee
  • Oxide film thickness standards
    Patent number: 6008503
    Abstract: A film thickness standard (FTS) comprises an oxide film formed on a semiconductor substrate with a thickness over 1 .mu.m. A method of preparing an oxide film thickness standard reference of semiconductor device is carried out by repeatedly and continuously performing the formation process of the oxide film under the same processing conditions thereby to form the oxide film on a semiconductor substrate with a thickness over a certain level.
    Type: Grant
    Filed: April 22, 1998
    Date of Patent: December 28, 1999
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jung-woo Sun, Sang-kil Lee