Patents by Inventor Jungyoon Yang

Jungyoon Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUPPORT UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
    Publication number: 20210280398
    Abstract: A support unit includes a first plate on which a substrate is seated, a second plate located under the first plate, a third plate located under the second plate, a ground electrode disposed between the first plate and the second plate, and a heater electrode disposed between the second plate and the third plate. The first plate includes a first dielectric plate, a conductive plate disposed under the first dielectric plate, and a second dielectric plate disposed under the conductive plate.
    Type: Application
    Filed: March 5, 2021
    Publication date: September 9, 2021
    Inventors: Seungjun Oh, Su Hyung Lee, Hyun Kyu Choi, Jin Woo Choi, Jungyoon Yang