Patents by Inventor Jungyoon Yang

Jungyoon Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240203702
    Abstract: A substrate processing apparatus includes a process chamber including a processing space, a heater located inside the process chamber and configured to heat a lower portion of the processing space, and a first heat source located inside the process chamber and spaced apart from the heater and configured to heat an upper portion of the processing space, a plurality of first protrusions protruding in a vertical direction from an upper surface of the heater, and a second protrusion protruding in the vertical direction from an edge portion of the upper surface of the heater.
    Type: Application
    Filed: December 19, 2023
    Publication date: June 20, 2024
    Applicant: SEMES CO., LTD.
    Inventors: SUNGIK PARK, Yongsu Jang, Seungpil Chung, Jungyoon Yang, Inseong Lim
  • Publication number: 20210280398
    Abstract: A support unit includes a first plate on which a substrate is seated, a second plate located under the first plate, a third plate located under the second plate, a ground electrode disposed between the first plate and the second plate, and a heater electrode disposed between the second plate and the third plate. The first plate includes a first dielectric plate, a conductive plate disposed under the first dielectric plate, and a second dielectric plate disposed under the conductive plate.
    Type: Application
    Filed: March 5, 2021
    Publication date: September 9, 2021
    Inventors: Seungjun Oh, Su Hyung Lee, Hyun Kyu Choi, Jin Woo Choi, Jungyoon Yang