Patents by Inventor Junghun KAWK

Junghun KAWK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING METHOD AND SELECTIVE DEPOSITION METHOD USING THE SAME
    Publication number: 20230323528
    Abstract: There is provided a substrate processing method. The method includes providing a substrate having a first surface area and a second surface area having a different surface state than that of the first surface area, exposing the substrate to a substrate surface treatment composition containing a deposition inhibitor, and exposing the substrate to a post-treatment composition containing HF.
    Type: Application
    Filed: February 24, 2023
    Publication date: October 12, 2023
    Applicants: SK Specialty Co., Ltd., Industry-University Cooperation Foundation Hanyang University ERICA Campus
    Inventors: SungWoong CHUNG, Junghun KAWK, Jihun LEE, Woohee KIM, Jeongmin LEE, Seohyun LEE