Abstract: A dry etching apparatus includes a process chamber; a support provided in the process chamber and configured to support a substrate; a gas supply configured to supply a process gas including a hydrogen gas (H2) and a fluorocarbon gas (CxFy) into the process chamber; a plasma source configured to generate plasma using the process gas in the process chamber, wherein the support includes: an electrostatic chuck on which the substrate is disposed; an edge ring provided along a circumference of the electrostatic chuck and supporting an edge region of the substrate; an adhesive gel pad provided between the electrostatic chuck and the edge ring; and a coating layer formed only on a surface of the edge ring, which is exposed to the plasma.

Abstract: A method of determining an Idle Stop and Go (ISG) ventilation condition may include an ISG restriction early step that calculates an expected external air temperature through modeling using information acquired from a vehicle and execute an ISG logic to determine whether ISG entrance is possible based on a current ventilation condition of the vehicle, an ISG restriction proceeding step that detects an voltage of an air-conditioning system, an ISG restriction ascertaining step that determines whether an ISG entrance condition is satisfied, wherein the ISG entrance condition includes comparing the expected external air temperature through modeling with a specific temperature and the voltage of the air-conditioning system with a specific voltage, and an ISG entrance step that controls an engine by performing the ISG entrance when the ISG entrance condition is satisfied.

Abstract: An ISG system may include a shift stage sensing unit that senses a shift stage of a transmission, a parking sensing unit that senses a driver's intension of parking by recognizing at least one of whether a vehicle enters a parking lot and whether a parking assistant system may be operated, and an ISG controller that stops an idle-stop of an engine when the shift stage of the shift stage sensing unit may be at a reverse stage or the parking sensing unit senses the driver's intension of parking.

Abstract: An ISG control method for a vehicle in a congested area, may include an N-stage stop determining step that determines whether a shift lever has moved from a D-stage to an N-stage and a brake has been operated, discriminating from when the shift lever is at the D-stage; an N-stage vehicle speed determining step that determines whether a vehicle speed is equal to or less than a predetermined N-stage stop vehicle speed after the N-stage stop determining step; and a remaining condition determining step for entering an idle-stop state, when the vehicle speed is equal to or less than the N-stage stop vehicle speed, as a result of performing the N-stage vehicle speed determining step, and when idle-stop entering conditions other than a position of the shift lever, the vehicle speed, and the history of a maximum traveling vehicle speed are satisfied.

Abstract: A device controls ISG (Idle Stop & Go) logic mounted in a vehicle equipped with an ISG system. The device includes a transmitting unit that shows the current state of a gear in the vehicle and controls the hydraulic pressure of a transmission in idle stop or restarting an engine, a driving unit that performs the idle stop when the pedal of a brake becomes ON, with the gear at a D (Drive)-range, and restarts the engine when the pedal of the brake becomes OFF, with the gear of the vehicle at the D-range, and a brake unit that controls movement of the vehicle by controlling the hydraulic pressure of the brake, in which brake unit controls the hydraulic pressure of a brake to be kept for a predetermined time from when the pedal of the brake becomes OFF.

Abstract: An apparatus and a method for controlling engine restarting of a vehicle includes a hood opening recognition switch automatically on when a hood of the vehicle is opened and outputting a hood opening recognition signal; a front sensor installed on the front of the vehicle and outputting a sensing signal by sensing an object positioned with a predetermined distance in front of the vehicle; a determination unit verifying whether at least one of the hood opening recognition signal and the sensing signal is inputted in the state where an engine of the vehicle is off; and a setting unit setting a lock of restarting of the engine when it is verified that at least one of the hood opening recognition signal and the sensing signal is inputted.

Abstract: A safety improvement method of an Idle Stop and Go (ISG) function may include: recognizing initial conditions that senses whether an engine is restarted, when the engine is restarted by the ISG, and whether a driver operates a vehicle, and determines whether to warn the driver; warning the driver that makes the driver recognize that the engine is restarted if it is determined to warn the driver in recognizing initial conditions; and stopping the warning that stops warning the driver after warning the drive has been executed. Warning the drive may be achieved by an alarm generated from a buzzer for a predetermined time and a visual screen that is provided for the driver.

Abstract: An ISG system prevents fuel consumption due to unnecessary idling, by controlling the start of an engine, in accordance with engine stop conditions and restart conditions of a vehicle equipped with an automatic transmission. A method includes determining whether prior conditions for engine stop in an engine controller when an engine is in operation is satisfied, determining whether the engine can be stopped, when the prior conditions for engine stop are satisfied, determining whether engine stop conditions is satisfied, when the engine can be stopped, stopping the engine that is in operation, when the engine stop conditions are satisfied, determining whether key start conditions are satisfied, when the engine is stopped, determining whether restart is possible, when the key start conditions are not satisfied, determining whether conditions for restart are satisfied, when restart is possible, and restarting the engine, when the restart conditions are satisfied.

Abstract: A device for controlling ISG logic is mounted in a vehicle equipped with an ISG system. The device includes a brake pedal switch, a shift lever switch that shows the current state of a gear of the vehicle, an inclination sensor that is mounted in the vehicle and measures the inclination of a road where the vehicle is positioned, a controller that internally controls the vehicle to an N (Neutral) state, regardless of the gear range shown by the shift lever switch, for the vehicle on a downhill, in accordance with the measured inclination, and an engine unit that performed idle stop when the brake pedal becomes ON, with the gear of the vehicle at a D (Drive) sate, and restarts the stopped engine when the brake pedal becomes OFF, with the gear of the vehicle at the D state.

Abstract: An apparatus for supplementing a brake vacuum pressure may include an engine control unit (ECU) that generates a vacuum pressure control signal for supplementing the brake vacuum pressure in accordance with the result of determining whether the brake vacuum pressure is included in a reference vacuum pressure range after a vehicle implements an ISG process, a sub-oil pump that is operated in accordance with a control signal from the ECU to supply hydraulic pressure to the inside of an automatic transmission after the vehicle implements the ISG process, a vacuum pump that generates and supplies the brake vacuum pressure to a brake system, and an electronic clutch that selectively couples the sub-oil pump and the vacuum pump to allow driving force of the sub-oil pump to be transmitted to the vacuum pump or to be cut, in accordance with whether the vacuum pressure control signal is sent thereto.

Abstract: A method and a HAC system controls a hill-state assist control (HAC) operation when restarting an engine of the vehicle having an idle stop and go (ISG) system for an automatic transmission. The method includes starting restarting of the engine by the ISG system and an HAC operation, monitoring the RPM of the engine, and releasing the HAC operation in a case where the RPM of the engine meets an HAC release condition, and maintaining the HAC operation until the HAC release condition is met in a case where the RPM of the engine does not meet the HAC release condition.

Abstract: An ISG entry apparatus and method is capable of operating ISG logic without employing a battery sensor. The ISG entry apparatus includes a starting voltage detection unit detecting a starting voltage of an ISG vehicle having no battery sensor mounted therein, a cooling water detection unit detecting a cooling water temperature of the ISG vehicle, an ISG entry frequency detection unit detecting an ISG entry frequency of the ISG vehicle, an accumulated charge amount detection unit detecting an accumulated charge amount of the ISG vehicle during driving, a starting number counting unit counting the starting number of the ISG vehicle, and an engine control unit determining whether or not to enter a mode in which an ISG operation is performed based on the starting voltage, the cooling water temperature, the ISG entry frequency, the accumulated charge amount, and the starting number and performing an ISG operation.

Abstract: An ISG system makes it possible improve fuel efficiency of a vehicle by achieving an ISG system at a low cost in a vehicle equipped with an automatic transmission and considerably improve commercial quality of a vehicle by relatively reducing the parts and cost for manufacturing the vehicle, without using a sub-oil pump and a hill-start assist control device.

Abstract: An ISG (Idle Stop and Go) display device of an ISG vehicle may include a driving information detecting unit that detects driving information of the vehicle, a memory unit that stores notification about ISG of the vehicle, a control unit that executes the ISG and detects situations of an operation and an abnormality of the ISG by using the driving information of the vehicle which may be input from the driving information detecting unit, and receives the notifications about the ISG which correspond to the situations from the memory unit, and a display unit that may be controlled by the control unit to display the notifications about the ISG in accordance with the situations.

Abstract: A control method of restarting an engine of an AT ISG vehicle may include a first step of restarting the engine when a state of the vehicle satisfies a restart condition after an idle-stop, a second step of keeping a throttle valve constant at a first critical value or less when a positional value of an acceleration pedal may be equal to a second critical value or more after the first step, and a third step of opening a throttle valve until the positional value of the acceleration pedal detected by the acceleration pedal position sensor and a positional value of the throttle valve detected by a throttle valve position sensor may be matched after a critical time passes, a shifting may be completed after the restarting, or when the acceleration pedal may be pressed down less than at the second critical value after the first step.

Abstract: A safety improvement method of an Idle Stop and Go (ISG) function may include: recognizing initial conditions that senses whether an engine is restarted, when the engine is restarted by the ISG, and whether a driver operates a vehicle, and determines whether to warn the driver; warning the driver that makes the driver recognize that the engine is restarted if it is determined to warn the driver in recognizing initial conditions; and stopping the warning that stops warning the driver after warning the drive has been executed. Warning the drive may be achieved by an alarm generated from a buzzer for a predetermined time and a visual screen that is provided for the driver.

Abstract: A method of determining an Idle Stop and Go (ISG) ventilation condition may include an ISG restriction early step that calculates an expected external air temperature through modeling using information acquired from a vehicle and execute an ISG logic to determine whether ISG entrance is possible based on a current ventilation condition of the vehicle, an ISG restriction proceeding step that detects an voltage of an air-conditioning system, an ISG restriction ascertaining step that determines whether an ISG entrance condition is satisfied, wherein the ISG entrance condition includes comparing the expected external air temperature through modeling with a specific temperature and the voltage of the air-conditioning system with a specific voltage, and an ISG entrance step that controls an engine by performing the ISG entrance when the ISG entrance condition is satisfied.

Abstract: An ISG restart control device of an ISG vehicle may include a seatbelt state detecting unit that detects fastening/unfastening state of a seatbelt, a door state detecting unit that detects opening/closing state of a door, a brake pedal state detecting unit that detects an operation state of a brake pedal, and a control unit that forcibly idle-stops or restarts an engine by receiving a driving state information of the vehicle and restricts restarting of the engine in accordance with the fastening/unfastening of the seatbelt, the opening/closing of the door, and the operation state of the brake pedal which may be detected by the seatbelt state detecting unit, the door state detecting unit, and the brake pedal state detecting unit, in the restarting.

Abstract: An ISG (Idle Stop and Go) display device of an ISG vehicle may include a driving information detecting unit that detects driving information of the vehicle, a memory unit that stores notification about ISG of the vehicle, a control unit that executes the ISG and detects situations of an operation and an abnormality of the ISG by using the driving information of the vehicle which may be input from the driving information detecting unit, and receives the notifications about the ISG which correspond to the situations from the memory unit, and a display unit that may be controlled by the control unit to display the notifications about the ISG in accordance with the situations.

Abstract: An ISG system makes it possible improve fuel efficiency of a vehicle by achieving an ISG system at a low cost in a vehicle equipped with an automatic transmission and considerably improve commercial quality of a vehicle by relatively reducing the parts and cost for manufacturing the vehicle, without using a sub-oil pump and a hill-start assist control device.