Patents by Inventor JUNGWON JO

JUNGWON JO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150136185
    Abstract: Provided is a substrate cleaning apparatus of cleaning a substrate. The substrate cleaning apparatus includes a cleaning chamber, a first cleaning nozzle, a cover member, an air flow generation unit, and an exhaust unit. The main cleaning chamber has a cleaning space in which the substrate is cleaned and includes a sidewall in which a first vent hole is defined. The first cleaning nozzle is disposed in the main cleaning chamber to spray a first cleaning solution. The cover member covers the main cleaning chamber and has one side in which a second vent hole is defined. The air flow generation unit supplies air into the cleaning space through the first vent hole. The exhaust unit is coupled to the one side of the cover member to suck and exhaust the air supplied into the cleaning space through the second vent hole.
    Type: Application
    Filed: August 6, 2014
    Publication date: May 21, 2015
    Inventors: JUNGWON JO, CHUNGHYUK LEE, Joon NAM, SEONG GU KANG, HAK KIM, SungKu BAEK, KYUNGJAE LEE