Patents by Inventor Junhai Yan

Junhai Yan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SPUTTERING TARGET HAVING REVERSE BOWNG TARGET GEOMETRY
    Publication number: 20180044778
    Abstract: Generally planar sputter targets having a reverse bow surface (i.e., convexity) facing the magnets in a magnetron assembly is provided. Methods of making Cu and Cu alloy targets are provided including an annealing step performed at temperatures of from 1100-1300 F for a period of about 1-2 hours. Targets made by the methods have increased grain sizes on the order of 30-90 microns.
    Type: Application
    Filed: February 23, 2016
    Publication date: February 15, 2018
    Inventors: Robert S. Bailey, Junhai Yan, Melvin Kirk Holcomb, Alexander Leybovich