Patents by Inventor Junhe QUAN

Junhe QUAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230017450
    Abstract: Embodiments provide a semiconductor fabrication method. The method includes: providing a substrate including an active layer; and forming a bit line contact layer and a bit line extending along a first direction, two sides of the bit line contact layer being in contact with the active layer and the bit line. Forming the bit line includes: forming a bit line stack including a semiconductor layer and a conductive layer stacked in sequence, the semiconductor layer covering a surface of the substrate and a surface of the bit line contact layer; etching part of the bit line stack to form initial bit lines arranged at intervals, the initial bit lines including a plurality of conductive lines; performing oxidation treatment on the semiconductor layer exposed between adjacent conductive lines to form an oxide layer, the semiconductor layer not oxidized being used as a semiconductor connection layer; and removing the oxide layer.
    Type: Application
    Filed: September 15, 2022
    Publication date: January 19, 2023
    Inventors: Yong LU, Zhongyuan LI, Junhe QUAN, Xiaojie SONG, Qiuhu PANG