Abstract: A laser beam combining apparatus, and a combined stepped reflector and a filling rate calculation method thereof are disclosed. The laser beam combining apparatus includes a two-dimensional light-emitting array and the combined stepped reflector used to reflect a plurality of laser beams emitted by the two-dimensional light-emitting array. The combined stepped reflector is composed of a plurality of reflective mirrors that have the same length but sequentially increasing widths and that are stacked in succession, where the distance between centers of the laser beams reflected by the combined stepped reflector is smaller than the distance between centers of the laser beams prior to the incidence, thus increasing the filling rate of the laser beams emitted by the two-dimensional light-emitting array. A method for calculating the filling rate of the laser beam combining apparatus is also provided.

Abstract: A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z?1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.

Abstract: A laser beam combining apparatus, and a combined stepped reflector and a filling rate calculation method thereof are disclosed. The laser beam combining apparatus includes a two-dimensional light-emitting array and the combined stepped reflector used to reflect a plurality of laser beams emitted by the two-dimensional light-emitting array. The combined stepped reflector is composed of a plurality of reflective mirrors that have the same length but sequentially increasing widths and that are stacked in succession, where the distance between centers of the laser beams reflected by the combined stepped reflector is smaller than the distance between centers of the laser beams prior to the incidence, thus increasing the filling rate of the laser beams emitted by the two-dimensional light-emitting array. A method for calculating the filling rate of the laser beam combining apparatus is also provided.

Abstract: A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z?1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.