Abstract: Disclosed herein is a substrate processing apparatus including a process chamber having a processing space defined therein to process a plurality of substrates, a gas injector provided on a upper side of the process chamber to inject a processing gas into the processing space, a plurality of substrate supports arranged inside the process chamber, the substrates being seated on the substrate supports, a substrate conveyor disposed in the process chamber to convey the plurality of substrates to different substrate supports among the substrate supports, and a substrate rotating part arranged to allow each of the plurality of substrates to be seated between neighboring ones of the plurality of substrate supports, and to rotate the substrates, wherein the substrate rotating part may include a tension adjuster disposed on at least a portion of the power transmitter to adjust a tension in the power transmitter.

Abstract: A dial-type shifting control apparatus of vehicles may include a dial bezel and an upper cover integrated into a single body to be rotated together when a dial is rotated, obviating formation of an operation gap between the dial bezel and the upper cover to prevent foreign substances from entering through the operation gap, and a button guide disposed under an upper cover attenuates an impact occurring when a P-gear button is returned, and thus to prevent noise, caused by striking of the upper cover when the P-gear button is returned, from being transmitted to the interior of a vehicle.

Abstract: An integrated control system of a vehicle includes: a power manager that receives power of a vehicle and supplies power to a first sensor, a second sensor, and a third sensor connected to an accelerator pedal, a brake pedal, and a transmission, respectively; a sensor signal receiver that receives an accelerator pedal output signal, a brake pedal output signal, and a transmission output signal from the first sensor, second sensor, and third sensor, respectively; a main controller that is connected to the power manager, monitors information about power supplied to the first sensor, second sensor, and third sensor, and integrally controls accelerating, braking, and shifting of the vehicle in response to the accelerator pedal output signal, brake pedal output signal, and transmission output signal; and a communicator that sends the accelerator pedal output signal, brake pedal output signal, and transmission output signal to a plurality of relevant control units.

Abstract: A dial-type shifting control apparatus of vehicles may include a dial bezel and an upper cover integrated into a single body to be rotated together when a dial is rotated, obviating formation of an operation gap between the dial bezel and the upper cover to prevent foreign substances from entering through the operation gap, and a button guide disposed under an upper cover attenuates an impact occurring when a P-gear button is returned, and thus to prevent noise, caused by striking of the upper cover when the P-gear button is returned, from being transmitted to the interior of a vehicle.

Abstract: Embodiments of the invention relate to a stage leveling device for a high-performance mask aligner, having enhanced leveling maintenance and, in particular, a novel technology of preventing leveling misalignment by firmly fixing a leveling-completed wafer stage. The stage leveling device, according to an embodiment of the invention addresses the problems experienced by conventional leveling devices. According to at least one embodiment, when a locking ring inserted at an outer side of a leveling rod maintains an inclined state, locking is performed such that an inner circumferential surface of the locking ring fixes opposite sides of the leveling rod by applying pressure thereto and, when the locking ring maintains a horizontal state, unlocking is performed such that the inner circumferential surface of the locking ring is spaced apart from the leveling rod.

Abstract: There is provided a scan and step exposure system to enable to perform the exposure on a large-sized subject to be exposed such as a film and a wafer, which was difficult to perform circuit patterning process on at one time, by transferring an exposure module by step feed way or making it moved continuously like scanning way in such way that an exposure subject is adsorbed on a chuck tray drawn out of the system body and the chuck tray is put into the body and placed under a mask holder, and a glass base having a film mask having circuit patterns adsorbed thereon is mounted on the mask holder, and the distance between the glass base and the exposure subject is controlled while moving the mask holder up and down, and the exposure process is performed while moving the exposure module located above the mask holder in the transverse direction continuously by scan way or by step feed way.

Abstract: There is provided a scan and step exposure system to enable to perform the exposure on a large-sized subject to be exposed such as a film and a wafer, which was difficult to perform circuit patterning process on at one time, by transferring an exposure module by step feed way or making it moved continuously like scanning way in such way that an exposure subject is adsorbed on a chuck tray drawn out of the system body and the chuck tray is put into the body and placed under a mask holder, and a glass base having a film mask having circuit patterns adsorbed thereon is mounted on the mask holder, and the distance between the glass base and the exposure subject is controlled while moving the mask holder up and down, and the exposure process is performed while moving the exposure module located above the mask holder in the transverse direction continuously by scan way or by step feed way.

Abstract: A system for providing parking information based on dual wireless communication including a vehicle terminal configured to connect to a server via a first wireless communication network when a parking information request is generated, and configured to connect to the server via a second wireless communication network if a connection via the first wireless communication network is failed, thereby receiving and displaying the parking information on a screen.

Abstract: The present invention relates to a novel compound isolated from Kaempferia pandurata Roxb and the use thereof as an antiviral agent. The compound isolated from Kaempferia pandurata Roxb shows the ability to inhibit highly pathogenic virus, and thus is a promising candidate for an antiviral agent.

Abstract: The present invention relates to a novel compound isolated from Allium tuberosum and the use thereof as an antiviral agent. The compound isolated from Allium tuberosum shows the ability to inhibit highly pathogenic virus, and thus is a promising candidate for an antiviral agent.

Abstract: A system for providing parking information based on dual wireless communication including a vehicle terminal configured to connect to a server via a first wireless communication network when a parking information request is generated, and configured to connect to the server via a second wireless communication network if a connection via the first wireless communication network is failed, thereby receiving and displaying the parking information on a screen.

Abstract: The present invention provides a vehicle network system interconnected with a home network that includes a vehicle information collection unit and a wireless transceiver unit. The vehicle information collection unit detects accident information or management information of a vehicle and the wireless transceiver unit transmits information detected by the vehicle information collection unit to the home network via a wireless communication network and is configured to receive a response signal from the home network.

Abstract: Disclosed is an apparatus for displaying a guide line for picture adjustment in a monitor.