Patents by Inventor Junichi Miyahara
Junichi Miyahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10462850Abstract: A method of manufacturing a ceramic sintered body, includes: a film forming step of forming, on a surface of a heat-resistant metal material, a metal coating film made of a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; a molding step of disposing the heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step.Type: GrantFiled: October 24, 2011Date of Patent: October 29, 2019Assignee: NHK Spring Co., Ltd.Inventors: Satoshi Hirano, Toshihiro Tachikawa, Junichi Miyahara, Toshihiko Hanamachi
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Patent number: 10276410Abstract: A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.Type: GrantFiled: November 2, 2012Date of Patent: April 30, 2019Assignee: NHK SPRING CO., LTD.Inventors: Toshihiro Tachikawa, Junichi Miyahara, Kazuhiro Yonekura, Toshihiko Hanamachi, Go Takahara, Jun Futakuchiya, Daisuke Hashimoto
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Patent number: 9414441Abstract: A shaft-equipped heater unit includes a heater plate that heats an object to be heated placed thereon, and a shaft part that supports the heater plate, wherein the shaft part is formed by spraying material powder which constitutes the shaft part on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas.Type: GrantFiled: May 29, 2012Date of Patent: August 9, 2016Assignee: NHK Spring Co., Ltd.Inventors: Gou Takahara, Toshihiro Tachikawa, Junichi Miyahara
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Patent number: 9153463Abstract: A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.Type: GrantFiled: November 25, 2011Date of Patent: October 6, 2015Assignee: NHK Spring Co., Ltd.Inventors: Jun Futakuchiya, Junichi Miyahara, Daisuke Hashimoto
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Publication number: 20140083995Abstract: A shaft-equipped heater unit includes a heater plate that heats an object to be heated placed thereon, and a shaft part that supports the heater plate, wherein the shaft part is formed by spraying material powder which constitutes the shaft part on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas.Type: ApplicationFiled: May 29, 2012Publication date: March 27, 2014Applicant: NHK SPRING CO., LTD.Inventors: Gou Takahara, Toshihiro Tachikawa, Junichi Miyahara
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Publication number: 20130200067Abstract: A method of manufacturing a ceramic sintered body, includes: a film forming step of forming, on a surface of a heat-resistant metal material, a metal coating film made of a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; a molding step of disposing heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step.Type: ApplicationFiled: October 24, 2011Publication date: August 8, 2013Applicant: NHK Spring Co., Ltd.Inventors: Satoshi Hirano, Toshihiro Tachikawa, Junichi Miyahara, Toshihiko Hanamachi
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Publication number: 20130134147Abstract: A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.Type: ApplicationFiled: November 25, 2011Publication date: May 30, 2013Applicant: NHK SPRING CO., LTD.Inventors: Jun FUTAKUCHIYA, Junichi Miyahara, Daisuke Hashimoto
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Patent number: 7372001Abstract: A ceramics heater comprises a circular heater plate formed of aluminum nitride and a metal foil heater wire formed of a high-melting metal and having a thickness of 100 ?m to 175 ?m. The heater wire is embedded in the heater plate. The heater wire has an inside portion located near the center of the heater plate and formed in zigzags at first pitches in the circumferential direction of the heater plate and an outside portion located near the outer periphery of the heater plate and formed in zigzags at second pitches in the circumferential direction of the heater plate. The second pitches are shorter than the first pitches.Type: GrantFiled: December 17, 2002Date of Patent: May 13, 2008Assignee: NHK Spring Co., Ltd.Inventors: Toshihiro Tachikawa, Junichi Miyahara, Toshihiko Hanamachi
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Publication number: 20040112888Abstract: A ceramics heater comprises a circular heater plate formed of aluminum nitride and a metal foil heater wire formed of a high-melting metal and having a thickness of 100 &mgr;m to 175 &mgr;m. The heater wire is embedded in the heater plate. The heater wire has an inside portion located near the center of the heater plate and formed in zigzags at first pitches in the circumferential direction of the heater plate and an outside portion located near the outer periphery of the heater plate and formed in zigzags at second pitches in the circumferential direction of the heater plate. The second pitches are shorter than the first pitches.Type: ApplicationFiled: December 17, 2002Publication date: June 17, 2004Applicant: NHK Spring Co., Ltd.Inventors: Toshihiro Tachikawa, Junichi Miyahara, Toshihiko Hanamachi