Abstract: A position measuring module includes a movement mirror provided on a movable member and having a reflecting surface along a first axis direction; detection-light units which are arranged for a plurality of measuring axes disposed in the first axis direction respectively and which irradiate, onto the movement mirror, detection lights in a second axis direction intersecting the first axis direction; a reference-light unit which includes a fixed mirror fixed to a member different from the movable member and which irradiates a reference light onto the fixed mirror; a plurality of optical path combining elements which combines detection optical paths for the detection lights reflected by the movement mirror in relation to the measuring axes respectively or combines the detection optical paths for the detection lights and a reference optical path for the reference light via the reference-light unit; and a detecting section which detects an interference fringe brought about by interference between the detection ligh