Abstract: A control apparatus for performing position control of a moving object is provided. The apparatus includes a feedforward controller configured to perform feedforward control by giving a feedforward manipulated variable to the moving object. In a case that a duration of the feedforward control exceeds a predetermined time, the feedforward controller continues the feedforward control using a feedforward manipulated variable obtained based on a feedforward manipulated variable used in a predetermined section including an end of the predetermined time.

Abstract: A control device for performing position control of a control target by imparting a feedforward operation amount to the control target to curb a control deviation even when a continuous target time of the control exceeds an upper limit in a case where the position control is performed by imparting the feedforward operation amount, including at least one processor or circuit configured to function as a determination unit configured to determine whether or not a target time for continuing the control using the feedforward operation amount exceeds a predetermined time, and a correction unit configured to correct the feedforward operation amount to be damped toward an end of the target time in a case where it is determined by the determination unit that the target time has exceeded the predetermined time.

Abstract: A control device for performing position control of a control target by imparting a feedforward operation amount to the control target to curb a control deviation even when a continuous target time of the control exceeds an upper limit in a case where the position control is performed by imparting the feedforward operation amount, including at least one processor or circuit configured to function as a determination unit configured to determine whether or not a target time for continuing the control using the feedforward operation amount exceeds a predetermined time, and a correction unit configured to correct the feedforward operation amount to be damped toward an end of the target time in a case where it is determined by the determination unit that the target time has exceeded the predetermined time.

Abstract: An exposure apparatus that exposes a substrate is provided. The apparatus includes a stage configured to hold and move the substrate, and a controller configured to control focus driving of the stage based on a measurement value and a correction value obtained for the focus driving of the stage for a shot region on the substrate. The controller is configured to determine the correction value in accordance with an angle of view at a time of exposure.

Abstract: The present invention provides a control device that performs position control of a control target by giving a feedforward manipulated value to the control target, wherein the device obtains, for each of a plurality of positions at which the control target is to be arranged, a measurement result of a first output response of the control target obtained when giving a first manipulated value to the control target, determines a reference value of the first output response, based on the measurement results respectively obtained at the plurality of positions, determines a second manipulated value by arraying a plurality of first manipulated values in time-series based on a relationship between the first manipulated value and the reference value, and sets the feedforward manipulated value based on the second manipulated value.

Abstract: The present invention provides a control device that performs position control of a control target by giving a feedforward manipulated value to the control target, wherein the device obtains, for each of a plurality of positions at which the control target is to be arranged, a measurement result of a first output response of the control target obtained when giving a first manipulated value to the control target, determines a reference value of the first output response, based on the measurement results respectively obtained at the plurality of positions, determines a second manipulated value by arraying a plurality of first manipulated values in time-series based on a relationship between the first manipulated value and the reference value, and sets the feedforward manipulated value based on the second manipulated value.

Abstract: An exposure apparatus that exposes a substrate is provided. The apparatus comprises a stage configured to hold and move the substrate, and a controller configured to control focus driving of the stage based on a measurement value and a correction value obtained for the focus driving of the stage for a shot region on the substrate. The controller is configured to determine the correction value in accordance with an angle of view at a time of exposure.

Abstract: The present invention provides an exposure apparatus which exposes a substrate, comprising a measurement unit configured to measure a height of the substrate at each of a plurality of measurement points, and a control unit configured to control the height of the substrate based on measurement results obtained by the measurement unit, and control an operation to arrange a shot region of the substrate in a first position and expose the shot region, wherein the shot region includes a plurality of partial regions, and the control unit causes the measurement unit to measure the height of the substrate by arranging the shot region in a second position different from the first position so that the number of measurement points arranged in the plurality of partial regions is larger than that when arranging the shot region in the first position.

Abstract: The present invention provides an exposure apparatus which exposes a substrate, comprising a measurement unit configured to measure a height of the substrate at each of a plurality of measurement points, and a control unit configured to control the height of the substrate based on measurement results obtained by the measurement unit, and control an operation to arrange a shot region of the substrate in a first position and expose the shot region, wherein the shot region includes a plurality of partial regions, and the control unit causes the measurement unit to measure the height of the substrate by arranging the shot region in a second position different from the first position so that the number of measurement points arranged in the plurality of partial regions is larger than that when arranging the shot region in the first position.

Abstract: An apparatus includes a stage configured to hold a substrate and to be moved, a measurement station including a measurement device configured to measure, with respect to each of a plurality of measurement points in a surface of the substrate held by the stage, a position of the surface, and an exposure station configured to expose the substrate to radiation while the stage is scanned, the stage being moved to the exposure station from the measurement station after the position of the surface is measured, and being scanned in the exposure station in accordance with the measured position of the surface, wherein the apparatus is configured to calculate a status concerning an error of a measurement value of the measurement device with respect to each of the plurality of measurement points based on outputs of the measurement device obtained with respect to the plurality of measurement points, and to set arrangement of the plurality of measurement points based on the calculated statuses.

Abstract: An apparatus comprises a device which measures a surface position of a substrate at a plurality of measurement points, and a controller configured to cause the device to measure the surface position under a condition that an arrangement direction in which the plurality of measurement points are arranged and a scanning direction of the substrate are not orthogonal to each other, wherein exposure on the substrate is controlled based on a measurement result obtained by the device.

Abstract: A fuel pump forming part of a fuel supply system for an automotive internal combustion engine. The fuel pump includes a hollow casing in which a pump section and an electric motor for driving the pump section are disposed. A connector is provided for connecting the electric motor to an external power source, and has a terminal. A brush is slidably contacted with a rotor of the electric motor so as to supply power to a coil of the rotor. A lead wire is provided for electrically connecting the terminal of the connector to the brush. A plating layer of tin is formed on the lead wire by a tin-electroplating.

Abstract: A turbine fuel pump includes an impeller having blades, each including a linear blade portion extending linearly in the radial direction of the impeller and a curved blade portion extending circularly curvedly from the head of the linear blade portion to the forward side of the impeller as viewed in the direction of rotation of the impeller. The linear blade portion has a length of (? to ?)×H, where H is an overall length of the impeller.

Abstract: A check valve includes a housing formed with a valve hole through which fluid flows, a valve seat formed on the peripheral wall of the valve hole, a valve element disposed in the valve hole to be movable between a valve closed position where the valve element makes close contact with the valve seat to close the valve hole and a valve open position where the valve element moves away from the valve seat in the downstream direction to open the valve hole, a coil spring for biasing the valve element toward the valve closed position wherein the coil spring is larger in outer diameter than valve element, and a pressure acting portion provided to the coil spring so as to undergo the pressure of fluid.

Abstract: An apparatus includes a stage configured to hold a substrate and to be moved, a measurement station including a measurement device configured to measure, with respect to each of a plurality of measurement points in a surface of the substrate held by the stage, a position of the surface, and an exposure station configured to expose the substrate to radiation while the stage is scanned, the stage being moved to the exposure station from the measurement station after the position of the surface is measured, and being scanned in the exposure station in accordance with the measured position of the surface, wherein the apparatus is configured to calculate a status concerning an error of a measurement value of the measurement device with respect to each of the plurality of measurement points based on outputs of the measurement device obtained with respect to the plurality of measurement points, and to set arrangement of the plurality of measurement points based on the calculated statuses.

Abstract: A turbine fuel pump includes an impeller having blades, each including a linear blade portion extending linearly in the radial direction of the impeller and a curved blade portion extending circularly curvedly from the head of the linear blade portion to the forward side of the impeller as viewed in the direction of rotation of the impeller. The linear blade portion has a length of (? to ?)×H, where H is an overall length of the impeller.

Abstract: A turbine fuel pump including a cylindrical casing, an electric motor accommodated in the casing, a pump housing mounted into the casing, and an impeller disposed within the pump housing and driven around an axis in a rotational direction by the electric motor. The impeller includes a plurality of vanes each formed into a generally rectangular plate including a tip end face that extends circumferentially to define an outer peripheral surface of the impeller, and front and rear faces respectively located on forward and rearward sides in the rotational direction of the impeller. The front face is curved such that a tip end portion thereof is positioned forwardly in the rotational direction of the impeller relative to a root portion thereof. A chamfer portion is disposed between the tip end face and a tip end portion of the front face.

Abstract: A fuel pump forming part of a fuel supply system for an automotive internal combustion engine. The fuel pump includes a hollow casing in which a pump section and an electric motor for driving the pump section are disposed. A connector is provided for connecting the electric motor to an external power source, and has a terminal. A brush is slidably contacted with a rotor of the electric motor so as to supply power to a coil of the rotor. A lead wire is provided for electrically connecting the terminal of the connector to the brush. A plating layer of tin is formed on the lead wire by a tin-electroplating.

Abstract: A turbine fuel pump including a cylindrical casing, an electric motor accommodated in the casing, a pump housing mounted into the casing, and an impeller disposed within the pump housing and driven around an axis in a rotational direction by the electric motor. The impeller includes a plurality of vanes each formed into a generally rectangular plate including a tip end face that extends circumferentially to define an outer peripheral surface of the impeller, and front and rear faces respectively located on forward and rearward sides in the rotational direction of the impeller. The front face is curved such that a tip end portion thereof is positioned forwardly in the rotational direction of the impeller relative to a root portion thereof. A chamfer portion is disposed between the tip end face and a tip end portion of the front face.

Abstract: A turbine fuel pump including a cylindrical casing, an electric motor accommodated in the casing, a pump housing mounted into the casing, and an impeller disposed within the pump housing and driven around an axis in a rotational direction by the electric motor. The impeller includes a plurality of vanes each formed into a generally rectangular plate including a tip end face that extends circumferentially to define an outer peripheral surface of the impeller, and front and rear faces respectively located on forward and rearward sides in the rotational direction of the impeller. The front face is curved such that a tip end portion thereof is positioned forwardly in the rotational direction of the impeller relative to a root portion thereof. A chamfer portion is disposed between the tip end face and a tip end portion of the front face.