Abstract: In order to be able to independently control a plasma density distribution both in a distribution with high center and a nodal distribution, and perform a plasma processing on a sample with higher accuracy for processing uniformity, a plasma processing apparatus includes: a vacuum vessel in which a plasma processing is performed on a sample; a radio frequency power source configured to supply radio frequency power for generating plasma; a sample stage on which the sample is placed; and a magnetic field forming unit configured to form a magnetic field inside the vacuum vessel and disposed outside the vacuum vessel, in which the magnetic field forming unit includes: a first coil; a second coil that is disposed closer to an inner side than the first coil and has a diameter smaller than a diameter of the first coil; a first yoke that covers the first coil, and an upper side and a side surface of the vacuum vessel, and in which the first coil is disposed; and a second yoke that covers the second coil along a perip

Abstract: A magnetic recording medium includes an amorphous buffer layer, a hybrid layer including a barrier layer, and a texture control layer. The magnetic recording medium also includes a heat sink layer, an under layer, and a perpendicular recording layer.

Abstract: According to one embodiment, a magnetic medium includes a substrate, and a magnetic recording layer positioned above the substrate, the magnetic recording layer including an ordered alloy having a L10-type structure, where the ordered alloy comprises a plurality of ferromagnetic crystal grains surrounded by non-magnetic grain boundaries, and where the ordered alloy comprises Fe, Ni and Pt.

Abstract: According to one embodiment, a magnetic medium includes a substrate, and a magnetic recording layer positioned above the substrate, the magnetic recording layer including an ordered alloy having a L10-type structure, where the ordered alloy comprises a plurality of ferromagnetic crystal grains surrounded by non-magnetic grain boundaries, and where the ordered alloy comprises Fe, Ni and Pt.

Abstract: A magnetic recording medium includes an amorphous buffer layer, a hybrid layer including a barrier layer, and a texture control layer. The magnetic recording medium also includes a heat sink layer, an under layer, and a perpendicular recording layer.

Abstract: Surface flatness of magnetic recording medium to which a magnetic recording layer made of L10 FePt magnetic alloy thin film, with distance between a magnetic head and a magnetic recording medium sufficiently reduced. The magnetic recording layer includes: magnetic layers containing a magnetic alloy including Fe and Pt as principal materials; and one non-magnetic material selected from carbon, oxide and nitride. The first magnetic layer disposed closer to a substrate has a granular structure in which magnetic alloy grains including FePt alloy as the principal material are separated from grain boundaries including the non-magnetic material as the principal material. The second magnetic layer disposed closer to the surface than the first magnetic layer is fabricated so as to have a homogeneous structure in which an FePt alloy and the non-magnetic material are mixed in a state finer than diameters of the FePt magnetic alloy grains in the first magnetic layer.

Abstract: Surface flatness of magnetic recording medium to which a magnetic recording layer made of L10 FePt magnetic alloy thin film, with distance between a magnetic head and a magnetic recording medium sufficiently reduced. The magnetic recording layer includes: magnetic layers containing a magnetic alloy including Fe and Pt as principal materials; and one non-magnetic material selected from carbon, oxide and nitride. The first magnetic layer disposed closer to a substrate has a granular structure in which magnetic alloy grains including FePt alloy as the principal material are separated from grain boundaries including the non-magnetic material as the principal material. The second magnetic layer disposed closer to the surface than the first magnetic layer is fabricated so as to have a homogeneous structure in which an FePt alloy and the non-magnetic material are mixed in a state finer than diameters of the FePt magnetic alloy grains in the first magnetic layer.

Abstract: There is provided a magnetic recording medium including an MgO underlayer that can be formed by a mass production process and has a thickness of 3 nm or less as well as including a magnetic recording layer made of an L10-type FePt ordered alloy having excellent magnetic properties. A conductive compound having a crystal structure belonging to a cubic system is used as a material of an underlayer provided at the bottom of the MgO underlayer. The thickness of the MgO layer is 1 nm or more and 3 nm or less.

Abstract: A perpendicular magnetic recording medium having sufficient perpendicular uniaxial magnetic anisotropy energy and a crystal grain size for realizing an areal recording density of one terabit or more per one square centimeter, and excellent in mass productivity, and a manufacturing method of the same are provided. On a substrate, a substrate-temperature control layer, an underlayer and a magnetic recording layer are sequentially formed. The magnetic recording layer is formed by repeating a magnetic layer stacking step N times (N?2), which includes a first step of heating the substrate in a heat process chamber, and a second step of depositing, in a deposition process chamber, the magnetic recording layer constituted of an alloy mainly composed of FePt to which at least one kind of non-magnetic material selected from a group constituted of C and an Si oxide is added.

Abstract: A magnetic recording medium having excellent stability of recorded magnetic signals and capable of recording magnetic signals by a thermally assisted magnetic recording system in which a magnetic recording layer of the magnetic recording medium contains ferromagnetic crystal grains of a Co—Ni—Pt alloy with a Pt content of 44 at % or more and 55 at % or less and with an atom content ratio: Ni/(Co+Ni) of 0.64 or more and 0.8 or less. The magnetic recording medium has extremely excellent stability of recorded magnetic signals since the Co—Ni—Pt alloy constituting the magnetic recording layer has an extremely high anisotropy field at a normal temperature. Further, the magnetic recording medium can perform signal recording based on the thermally assisted magnetic recording system since the Co—Ni—Pt alloy constituting the magnetic recording layer has a Curie point within an appropriate temperature range.