Patents by Inventor Junichi Tonotani

Junichi Tonotani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for exposing a photosensitive resist layer with near-field light
    Patent number: 6869737
    Abstract: In a method for exposing a photosensitive resist layer with near-field light, a liquid film layer is provided between the photosensitive resist layer and a photomask. The photomask has a light-shielding film containing an opening portion through which a propagated light emitted from a light source cannot pass. The photosensitive resist layer is exposed with near-field light through the opening portion and the liquid film layer.
    Type: Grant
    Filed: February 2, 2004
    Date of Patent: March 22, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Keiji Suzuki, Hideki Ookawa, Junichi Tonotani
  • Light-emitting device and method for manufacturing the same
    Patent number: 6825056
    Abstract: A nanometer size roughened structure is formed on a surface of a light-emitting element, and luminous efficiency is improved. The roughened structure is formed into the following shape to change refractive index smoothly: (1) the mean diameter of projections on the roughened surface is smaller than the light wavelength; (2) a pitch of the roughened surface is irregular; and (3) positions of the top and bottom of the roughened surface are distributed from their mean values within the light wavelength. The surface of such light-emitting element is obtained by forming a thin film on the surface of the light-emitting element using a block or graft copolymer comprising resin composition and forms a self-assembled microphase-separated structure; selectively removing at least one phase of the microphase-separated structure; and etching the surface of the light-emitting element using the remaining phase as an etching mask.
    Type: Grant
    Filed: December 30, 2002
    Date of Patent: November 30, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Koji Asakawa, Akira Fujimoto, Hitoshi Sugiyama, Kenichi Ohashi, Kenji Suzuki, Junichi Tonotani
  • Method for exposing a photosensitive resist layer with near-field light
    Publication number: 20040152323
    Abstract: In a method for exposing a photosensitive resist layer with near-field light, a liquid film layer is provided between the photosensitive resist layer and a photomask. The photomask has a light-shielding film containing an opening portion through which a propagated light emitted from a light source cannot pass. The photosensitive resist layer is exposed with near-field light through the opening portion and the liquid film layer.
    Type: Application
    Filed: February 2, 2004
    Publication date: August 5, 2004
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Keiji Suzuki, Hideki Ookawa, Junichi Tonotani
  • Light-emitting device and method for manufacturing the same
    Publication number: 20030173568
    Abstract: A nanometer size roughened structure is formed on a surface of a light-emitting element, and luminous efficiency is improved.
    Type: Application
    Filed: December 30, 2002
    Publication date: September 18, 2003
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Koji Asakawa, Akira Fujimoto, Hitoshi Sugiyama, Kenichi Ohashi, Kenji Suzuki, Junichi Tonotani
  • High frequency discharging method and apparatus, and high frequency processing apparatus
    Patent number: 6323595
    Abstract: Arranging a linear antenna in a container, and connecting a condenser to a grounding side of the linear antenna, and/or between a plurality of linear antennas, and changing capacity of the condenser, thereby changing high-frequency voltage distribution on the linear antenna and/or on the plurality of linear antennas, and controlling electrostatic coupling between the plasma and the linear antenna and/or the plurality of linear antennas.
    Type: Grant
    Filed: August 31, 2000
    Date of Patent: November 27, 2001
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Junichi Tonotani, Keiji Suzuki
  • High frequency discharging method and apparatus, and high frequency processing apparatus
    Patent number: 6181069
    Abstract: Arranging a linear antenna in a container, and connecting a condenser to a grounding side of the linear antenna, and/or between a plurality of linear antennas, and changing capacity of the condenser, thereby changing high-frequency voltage distribution on the linear antenna and/or on the plurality of linear antennas, and controlling electrostatic coupling between the plasma and the linear antenna and/or the plurality of linear antennas.
    Type: Grant
    Filed: February 17, 1999
    Date of Patent: January 30, 2001
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Junichi Tonotani, Keiji Suzuki