Patents by Inventor Junichi Yayanagi

Junichi Yayanagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device having a fuse and a fabrication process thereof
    Patent number: 6617664
    Abstract: In a semiconductor device having a fuse and an etching stopper film covering the fuse, an optical window exposing the etching stopper film and a contact hole exposing a conductor pattern are formed simultaneously. By applying a dry etching process further to the etching stopper film, an insulation film covering the fuse is exposed in the optical window.
    Type: Grant
    Filed: April 18, 2002
    Date of Patent: September 9, 2003
    Assignee: Fujitsu Limited
    Inventors: Manabu Hayashi, Junichi Yayanagi
  • Semiconductor device having a fuse and a fabrication process thereof
    Publication number: 20020111004
    Abstract: In a semiconductor device having a fuse and an etching stopper film covering the fuse, an optical window exposing the etching stopper film and a contact hole exposing a conductor pattern are formed simultaneously. By applying a dry etching process further to the etching stopper film, an insulation film covering the fuse is exposed in the optical window.
    Type: Application
    Filed: April 18, 2002
    Publication date: August 15, 2002
    Applicant: FUJITSU LIMITED
    Inventors: Seiichi Suzuki, Kazuhiro Adachi, Masaya Katayama, Noriyuki Suzuki, Osamu Hideshima, Kenichi Kawabata, Masaya Ohtsuki, Manabu Hayashi, Junichi Yayanagi
  • Semiconductor device having a fuse and a fabrication method thereof
    Patent number: 6399472
    Abstract: In a semiconductor device having a fuse and an etching stopper film covering the fuse, an optical window exposing the etching stopper film and a contact hole exposing a conductor pattern are formed simultaneously. By applying a dry etching process further to the etching stopper film, an insulation film covering the fuse is exposed in the optical window.
    Type: Grant
    Filed: June 11, 1999
    Date of Patent: June 4, 2002
    Assignee: Fujitsu Limited
    Inventors: Seiichi Suzuki, Kazuhiro Adachi, Masaya Katayama, Noriyuki Suzuki, Osamu Hideshima, Kenichi Kawabata, Masaya Ohtsuki, Manabu Hayashi, Junichi Yayanagi