Abstract: An object of the present invention is to improve the efficiency of a driving operation of an angular rate sensor employing a tuning fork oscillator made of single crystalline piezoelectric material such as quartz.

Abstract: An angular velocity sensor includes first exciters providing a vibrator with drive vibration, a piezoelectric element having a vibration detector for detecting vibration level of the vibrator, and Coriolis detectors for detecting Coriolis vibration depending on an input angular velocity, and including a driving circuit for receiving a signal from the vibration detector and issuing a signal to the first exciters and a detection circuit for receiving signals from the Coriolis detectors. The circuit section further includes a level judging circuit for judging abnormal levels of electric charges in the Coriolis detectors and a fail detector for issuing an output when abnormality is detected. Each output of the Coriolis detectors contains a drive vibration component larger than the reference level of the level judging circuit, and the layout of the electrodes in the element section is adjusted so that combined output may contain the component smaller than the reference level.

Abstract: A sensor comprises a detecting element, a circuit board having digital correction function and having connection pads for digital correction for processing a signal of the detecting element, a connector connected electrically to the circuit board for exchanging signals between the circuit board and an external electric system, and holes through which connection pads for digital correction are visible. The holes are provided in the opening of the connector for contacting electrically with a probe for characteristic correction.

Abstract: In an angular velocity sensor device, a vibration isolation member, a sensor support plate on which a tuning fork unit functioning as a vibrating type angular velocity sensor is mounted, a collar, a circuit board on which a circuit pattern is formed for driving the tuning fork unit and processing a signal output therefrom are provided by having a plurality of pins inserted, in this order, which extend from the bottom surface of a concave-shaped case. The circuit pattern and the tuning fork unit are connected with each other via a flexible printed circuit board. These components are accommodated inside the concave-shaped case. A cover is fitted in an open top of the case so as to completely seal the case. The angular velocity sensor device with the aforementioned arrangement does not suffer variation in the operational properties due to disturbance vibration and deterioration in the vibration isolation property.